1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Controller
Model: 1179C
1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Controller
Model: 1179C
Overview
Overview
The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer. The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type "D" connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.
Technical Specs
- TypeMass Flow Controller
- Label override for Attribute 02 - 100% of Full Scale
- Full Scale Flow Range10 - 20,000 sccm (N2 equivalent)
- Fitting TypeComparable to Swagelok® 4 VCR®, Swagelok 4 VCO®, 0.25 in. Swagelok®
- Flow Input Output SignalCE
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Pressure Coefficient0 - 5 VDC from <20 kOhm
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time<2 sec (per SEMI Guideline E17-91)
- Operating Temperature0 - 50°C
- Wetted Materials316L stainless steel, Viton®, nickel
- External Leak Integrity<1 x 10-9
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
- Surface FinishBuna - N, Neoprene®, Kalrez®
- DeviceNet ConnectorAnalog, 9-pin or 15-pin type "D" (The 15-pin type "D" connector is electronically compatible with other MKS flow controllers.)
- DeviceNet Input Power Required0 - 5 VDC into >10 kOhm
- Maximum Current Required at Start-upNormally closed
- Typical Current Required at Steady State±15 VDC (±5%) @ 200 mA
- Digital I/O Level of Filtering±15 VDC (±5%) @ 100 mA
- Valve State<0.02% of Reading/psi
Notes:
General footnote
- Attribute Footnote
Technical Specs
- TypeMass Flow Controller
- Label override for Attribute 02 - 100% of Full Scale
- Full Scale Flow Range10 - 20,000 sccm (N2 equivalent)
- Fitting TypeComparable to Swagelok® 4 VCR®, Swagelok 4 VCO®, 0.25 in. Swagelok®
- Flow Input Output SignalCE
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Pressure Coefficient0 - 5 VDC from <20 kOhm
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time<2 sec (per SEMI Guideline E17-91)
- Operating Temperature0 - 50°C
- Wetted Materials316L stainless steel, Viton®, nickel
- External Leak Integrity<1 x 10-9
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
- Surface FinishBuna - N, Neoprene®, Kalrez®
- DeviceNet ConnectorAnalog, 9-pin or 15-pin type "D" (The 15-pin type "D" connector is electronically compatible with other MKS flow controllers.)
- DeviceNet Input Power Required0 - 5 VDC into >10 kOhm
- Maximum Current Required at Start-upNormally closed
- Typical Current Required at Steady State±15 VDC (±5%) @ 200 mA
- Digital I/O Level of Filtering±15 VDC (±5%) @ 100 mA
- Valve State<0.02% of Reading/psi
Notes:
General footnote
- Attribute Footnote
Resources & Downloads
Drawings & CADs
1179C Dimensional Drawing(54.6 kB, PDF)