317 Convection-Enhanced Pirani Vacuum Pressure Sensors
Overview
317 Convection-Enhanced Pirani Vacuum Sensors are general purpose vacuum gauges for foreline pressure measurement up to 1000 Torr. They can be used in many industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze dryers. Bakable and radiation-resistant versions of the 317 Convection-Enhanced Pirani Vacuum Sensor are suitable for high-energy physics applications.
- Ideal for foreline measurement and vacuum control
- 1.0 x 10-3 to 1000 Torr measurement range
- Bakeable and radiation-resistant versions available
- Low cost, rugged design
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, NW16 ISO-KF
$325
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103170010SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, NW16 ISO-KF | $325 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 0.125 NPT Male
$325
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103170011SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 0.125 NPT Male | $325 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 8 VCR Female
$384
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103170012SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 8 VCR Female | $384 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 1.33 in. Mini-CF
$384
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103170013SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 1.33 in. Mini-CF | $384 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 2.75 in. CF
$384
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103170014SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 2.75 in. CF | $384 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 15 mm Tube
$384
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103170016SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 15 mm Tube | $384 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 18 mm Tube
$384
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103170018SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 18 mm Tube | $384 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 2.75 in. CF
$1,103
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103170024SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 2.75 in. CF | $1,103 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, NW25 ISO-KF
$338
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103170027SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, NW25 ISO-KF | $338 |
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Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 4 VCR Female
$338
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103170029SH Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 4 VCR Female | $338 |
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Specifications
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Sensor TypeConvection-Enhanced Pirani
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Measurement Range1.0 x 10-3 to 1.0 x 10+3 Torr
1.3 x 10-3 to 1.3 x 10+3 mbar
1.3 x 10-1 to 1.3 x 10+5 Pascal -
Set Point Range2.0 x 10-3 to 9.5 x 10+2 Torr
2.7 x 10-3 to 1.2 x 10+3 mbar
2.7 x 10-1 to 1.2 x 10+5 Pascal -
Resolution1% of indicated decade
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Reproducibility5% of indicated pressure
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Connector9-pin Type "D"
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Operating Temperature0° to 50°C (32° to 122°F)
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Bake Out Temperature100° C non-operating without cable and electronics
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Exposed Materials304 stainless steel, nickel 200, glass, platinum
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Internal Volume8.0 cc
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Weight0.5 lb (0.2 kg), 1.34 lb (0.52 kg) with a 23/4 inch CF flange
Resources
Drawings & CADs
- 317 Convection-Enhanced Pirani Sensor Dimensional Drawing (56.4 kB, PDF)
Literature
- 937B UHV (Ultra High Vacuum) Gauging for High Energy Physics (300.7 kB, PDF)
Ultra-High Velocity