Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 1.33 in. Mini-CF
Model: 103170013SH
Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 1.33 in. Mini-CF
Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 1.33 in. Mini-CF
Model: 103170013SH
Overview
Overview
The 103170013SH Convection-Enhanced Pirani Vacuum Sensor features a 0.001 to 1000 Torr vacuum measurement range, and a 1.33 in. Mini-CF flange fitting. 317 Convection-Enhanced Pirani Vacuum Sensors are general purpose vacuum gauges for foreline pressure measurement. They can be used in many industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze dryers. Bakeable and radiation-resistant versions of the 317 Convection-Enhanced Pirani Vacuum Sensor are suitable for high-energy physics applications.
Technical Specs
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TypeShielded Convection-enhanced Pirani Sensor
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Measurement Range1.0 x 10-3 to 1.0 x 10+3 Torr, 1.3 x 10-3 to 1.3 x 10+3 mbar, 1.3 x 10-1 to 1.3 x 10+5 Pascal
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Set Point Range2.0 x 10-3 - 9.5 x 10+2 Torr, 2.7 x 10-3 - 1.2 x 10+3 mbar, 2.7 x 10-1 - 1.2 x 10+5 Pascal
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Resolution1% of indicated decade
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Reproducibility5% of indicated pressure
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Fitting TypeMini-CF
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Flange Size1.33 in.
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Connector9-pin D-sub
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Operating Temperature0 - 50°C (32 - 122°F)
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Bake Out Temperature100°C non-operating without cable and electronics
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Exposed Materials304 stainless steel, nickel 200, glass, platinum
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Internal Volume0.5 in3 (8.0 cm3) max.
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CableMulticonductor shielded cable
Resources & Downloads
Drawings & CADs
- 317 Convection-Enhanced Pirani Sensor Dimensional Drawing (56.4 kB, PDF)
Pirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 1.33 in. Mini-CF
Ultra-High Velocity