MKS Flow Products Cross Reference Chart

Below is a list of discontinued MKS Flow Measurement and Control products and a link to the recommended replacement products. The recommended replacement product is the closest match for most common applications. In some cases, the newer product is not a direct replacement for the older product. Contact MKS Instruments for assistance in these situations.

See a list of current MKS Instruments Flow, Measurement, Control & Verification Products

Product Recommended Replacement
1153A Pressure Based Mass Flow Controller Contact MKS Applications Engineering
1159B Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
1160B Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Adapter Cable
1161B Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Adapter Cable
1162B Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
1258C Mass Flow Controller Contact MKS Applications Engineering
1259C Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Length Adapter
1449A Metal-sealed Mass Flow Controller
with Positive Shut-off		 Contact MKS Applications Engineering
1459C Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1461C Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
Contact MKS Applications Engineering for Adapter Cable
1462C Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1479A Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1479B Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1480A Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1579 Elastomer-sealed 50-300 slm Mass Flow Controller Contact MKS Applications Engineering
1640 Metal-sealed Pressure-based 2-20 sccm Mass Flow Controller Contact MKS Applications Engineering
1661A Metal-sealed Mass Flow Controller P4B Metal-sealed Mass Flow Controller
1679B Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1679B Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1679B Metal-sealed Mass Flow Controller GM50A Metal-sealed General Purpose Mass Flow Controller
1749A Elastomer Sealed Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
1759A Elastomer Sealed Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
for flow rates up to 50 slm, N2 Equivalent, otherwise
Contact MKS Applications Engineering
180A Metal-sealed Mass Flow Meter GM50A Metal-sealed General Purpose Mass Flow Controller
2159B Mass Flow Controller
with Shut-off Valve		 GV50A General Purpose Mass Flow Controller with Shut-off Valve
2179A Elastomer Sealed Mass Flow Controller
with Integral Shut-off Valve		 GV50A General Purpose Mass Flow Controller with Shut-off Valve
2179B Elastomer Sealed Mass Flow Controller
with Integral Shut-off Valve		 GV50A General Purpose Mass Flow Controller with Shut-off Valve
2258C Mass Flow Controller Contact MKS Applications Engineering
2259C Mass Flow Controller
with Shut-off Valve		 GV50A General Purpose Mass Flow Controller with Shut-off Valve
Contact MKS Applications Engineering for Length Adapter
258C Elastomer Sealed Mass Flow Meter GM50A Metal-sealed General Purpose Mass Flow Controller
579 Mass Flow Meter Contact MKS Applications Engineering
647C Multichannel Gas Flow & Pressure Controller 946 Vacuum System Controller
PAC 100/MFC Module Programmable Automation Control
748A Elastomer Sealed Mass Flow Meter GM50A Metal-sealed General Purpose Mass Flow Controller
758A Elastomer Sealed Mass Flow Meter GM50A Metal-sealed General Purpose Mass Flow Controller
for flow rates up to 50 slm, N2 Equivalent, otherwise
Contact MKS Applications Engineering
IE50A Mass Flow Controllers & Meters Contact MKS Applications Engineering
IE250A Mass Flow Controllers & Meters Contact MKS Applications Engineering
IM50A Mass Flow Controllers & Meters Contact MKS Applications Engineering
IM100A Mass Flow Controllers & Meters Contact MKS Applications Engineering
IM250A Mass Flow Controllers & Meters Contact MKS Applications Engineering
M100B Elastomer Sealed Mass Flow Controller GE50A Elastomer-sealed General Purpose Mass Flow Controller
M10MB Elastomer Sealed Mass Flow Meter GM50A Metal-sealed General Purpose Mass Flow Controller
M200 Metal-sealed Mass Flow Controller P4B Metal-sealed Mass Flow Controller
M330A Metal-sealed Mass Flow Controller Contact MKS Applications Engineering
M330AH Metal-sealed Mass Flow Controller
with Remote Electronics		 Contact MKS Applications Engineering
M330B Metal-sealed Mass Flow Controller Contact MKS Applications Engineering
M330H Metal-sealed Mass Flow Controller
with Remote Electronics		 Contact MKS Applications Engineering
PFC-20 (P2B) Low Pressure Drop, Metal-sealed, 2-20 sccm Mass Flow Controllers Contact MKS Applications Engineering