Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA

Technical Specs

  • Mass Range
    1 - 100 amu, 1 - 200 amu, or 1 - 300 amu
  • Ion Source
    Open ion source
  • Filaments
    Twin Tungsten or Thoria filaments
  • Mass Filter
    Double filter (1 in. "RF only" pre-filter with 4 in. main filter)
  • Detector
    Dual (Faraday and secondary electron multiplier)
  • Maximum Analyzer Operating Pressure
    7.6e-5 Torr (1e-4 mbar)
  • Minimum Detectable Partial Pressure
    Faraday: 2e-11 Torr (2.7e-11 mbar), Secondary electron multiplier: 5e-14 Torr (6.7e-14 mbar)
  • Mass Stability
    Better than ±0.1 amu over 8 hours at stable ambient temperature
  • Resolution
    Better than 10% valley for peaks of equal height across mass range
  • Mounting Flange
    DN35CF (70 mm/2.75 in. OD) Conflat
  • Vacuum Hardware
    Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
  • Bake Out Temperature
    200°C with Bakeout Jacket
  • Pneumatics
    60-80 psig CDA
  • Electronics Weight on Flange
    1.7 kg
  • Power Requirements
    24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz
  • Maximum Operating Conditions
    Electronics: 10 - 40°C, 80% RH (non condensing)
  • LED Status Indication
    Interlock status, emission OK, SEM, power and communications
  • I/O Capability
    4 analog inputs (-11 to +11 v, 22 bit), 2 analog outputs (0-10 V, 12 bit), 16 digital TTL I/O, 1 opto-isolated filament control input, one dedicated gauge port, Optional PC-based Generic I/O support for PCI slots, USB and Ethernet I/O devices. Modbus/GEM SECS support for some product configurations.
  • Other Facilities
    Leak check headset socket, external filament trip socket, instrument reset
  • Software
    Process Eye Professional fully network compatible control platform generating under Microsoft Windows 2000, XP or Vista
  • Communication
    Ethernet CAT-5e
  • PC Requirements
    Intel Pentium IV or AMD Athlon XP 1.2 GHz, 1024 MB RAM, 120 GB disk free space drive. Multi-sensor installation may require higher specifications.
  • Simultaneous Multi-Sensor
    Process Eye Professional client/server configuration offers flexible multi-sensor operation.
  • Shipping Weight
    25 lbs (11.4 kg)
  • Type
    Residual Gas Analyzer
  • Measurement Technique
    Mass Spectrometry
  • Compliance
    Compliant to RoHS Directive 2002/95/EC (control unit)

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