The Vision 2000-B™ Baseline Monitor Residual Gas Analyzer tracks levels of potentially damaging residual gases that negatively impact the quality. It features "smart head" technology with an electronics unit that mounts directly onto the analyzer head, and connects to the system PC via Ethernet. Vision 2000-B™ is an application-specific instrument that monitors vacuum pumpdown, baseline, and leakback conditions on semiconductor and thin film process tools, and alerting to conditions that impact yield.
Better than 10% valley for peaks of equal height across mass range
Mounting Flange
DN35CF (70 mm/2.75 in. OD) Conflat
Vacuum Hardware
Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
Interlock status, emission OK, SEM, power and communications
I/O Capability
4 analog inputs (-11 to +11 v, 22 bit), 2 analog outputs (0-10 V, 12 bit), 16 digital TTL I/O, 1 opto-isolated filament control input, one dedicated gauge port, Optional PC-based Generic I/O support for PCI slots, USB and Ethernet I/O devices. Modbus/GEM SECS support for some product configurations.
Better than 10% valley for peaks of equal height across mass range
Mounting Flange
DN35CF (70 mm/2.75 in. OD) Conflat
Vacuum Hardware
Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
Interlock status, emission OK, SEM, power and communications
I/O Capability
4 analog inputs (-11 to +11 v, 22 bit), 2 analog outputs (0-10 V, 12 bit), 16 digital TTL I/O, 1 opto-isolated filament control input, one dedicated gauge port, Optional PC-based Generic I/O support for PCI slots, USB and Ethernet I/O devices. Modbus/GEM SECS support for some product configurations.
Additional CAD file downloads are not available for this product.
VISION-2000-B - Drawings
Additional drawings are not available for this product.
VISION-2000-B
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Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA