The HA-MFV High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods. The HA-MFV is more accurate and is insensitive to external volume (from MFC to the HA-MFV) and variation, delivering more precise matching of measurements between devices on multiple tools for the same process, assuring precise tool-to-tool process matching. The HA-MFV, High Accuracy Mass Flow Verifier is designed for use in gas-based process tools requiring fast, accurate verification of mass flow controllers and meters.