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high accuracy in-situ mass flow verifier devicenet
HA-MFV
Mass Flow Verifier, 1% of Reading Accuracy, 5 - 3000 sccm
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 HA-MFV Mass Flow Verifier, 1% of Reading Accuracy, 5 - 3000 sccm
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Specifications

  • Mass Flow Verification Accuracy
    ±1.0% of Reading
  • Mass Flow Verification Range
    5 - 3000 sccm (N2 equivalent)
  • Repeatability
    ±0.5% of Reading
  • Reproducibility
    ±0.3% of Reading
  • Pressure Range
    100 Torr
  • Pressure Accuracy
    0.25% of Reading
  • Proof Pressure
    45 psia
  • Burst Pressure
    150 psig
  • Minimum Penumatic Air Supply Pressure
    80 psig
  • Maximum Penumatic Air Supply Pressure
    100 psig
  • Span Temperature Coefficient
    <0.002% Reading/°C
  • Warm-up Time
    60 minutes
  • Operating Temperature
    10° to 40°C
  • Temperature Display
    0 - 100°C
  • Temperature Accuracy
    ± 2°C
  • Temperature Resolution
    0.1°C
  • Storage Humidity
    0 to 95% RH non-condensing
  • Storage Temperature
    -20° to 60°C
  • Control Interface
    DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
  • Diagnostic Interface
    Ethernet RJ-45 female
  • Input Voltage
    11 to 25 VDC
  • Gas Supply Fitting
    Swagelok® compatible 8-VCR® female, rotatable
  • Vacuum Supply Fitting
    Swagelok® compatible 8-VCR® male type, rotatable
  • Pneumatic Air Supply Fitting
    1/8 inch one-touch quick connect tube
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Wetted Materials
    316L SST passivated, Inconel, Incoloy
  • Seal Material
    316 SST nickel plated
  • Valve Seat Material
    PCTFE with Elgiloy® Diaphragm
  • Surface Finish
    <32 µ inches Ra
  • Dimensions
    6.98 x 10.0 x 10.0 in.
  • Weight
    23.9 lbs
  • Compliance
    CE

Features

Sonic Flow Technology

The insensitivity of the HA-MFV to external volume is realized through the use on sonic nozzle technology. The sonic nozzle creates a pressure drop and sonic flow conditions. In sonic flow, variations in pressure downstream of the nozzle have no effect on upstream conditions. Thus, the sonic nozzle effectively decouples the measurement in the HA-MFV from the upstream volume.

Better Measurement Accuracy

The HA-MFV is able to provide significantly better measurement accuracy and is insensitive to external volume (volume from MFC to the HA-MFV) conditions and variation. This insensitivity of the HA-MFV to external volume also results in more precise matching of measurements between HA-MFVs on multiple tools for the same process. This assures the user of precise tool-to-tool process matching.

Resources

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