High Accuracy In-Situ Mass Flow Verifier

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HA-MFV, High Accuracy Mass Flow Verifier

Overview

Enables "Wafer-to-Wafer" "Chamber-to-Chamber" & "Tool-to-Tool" Matching

The HA-MFV, High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods.

1.0% accuracy for wafer-to-wafer, chamber-to-chamber, & tool-to-tool process matching
Supports multiple gas panels to reduce implementation costs
5 to 3000 sccm measurement range for a wide variety of processes
In-situ assessment of MFC flow rate improves process control and avoids unneeded down-time

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		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Repeatability	Reproducibility	Full Scale Verification Range	Typical Accuracy	Availability	Featured Item	Price		Brand
		HA-MFV Mass Flow Verifier, 1% of Reading Accuracy, 5 - 3000 sccm Contact Us	HA-MFV Mass Flow Verifier, 1% of Reading Accuracy, 5 - 3000 sccm	UNIVERSAL	0.0	1.0	0.0		0.0	Mass Flow Verifier	±0.5% of Reading	±0.3% of Reading	5 - 3000 sccm (N2 equivalent)	±1.0% of Reading	Contact Us

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Specifications

Mass Flow Verification Accuracy

±1.0% of Reading
Mass Flow Verification Range

5 - 3000 sccm (N2 equivalent)
Repeatability

±0.5% of Reading
Reproducibility

±0.3% of Reading
Pressure Range

100 Torr
Pressure Accuracy

0.25% of Reading
Proof Pressure

45 psia
Burst Pressure

150 psig
Minimum Penumatic Air Supply Pressure

80 psig
Maximum Penumatic Air Supply Pressure

100 psig
Span Temperature Coefficient

<0.002% Reading/°C
Warm-up Time

60 minutes
Operating Temperature

10° to 40°C
Temperature Display

0 - 100°C
Temperature Accuracy

± 2°C
Temperature Resolution

0.1°C

Storage Humidity

0 to 95% RH non-condensing
Storage Temperature

-20° to 60°C
Control Interface

DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
Diagnostic Interface

Ethernet RJ-45 female
Input Voltage

11 to 25 VDC
Gas Supply Fitting

Swagelok® compatible 8-VCR® female, rotatable
Vacuum Supply Fitting

Swagelok® compatible 8-VCR® male type, rotatable
Pneumatic Air Supply Fitting

1/8 inch one-touch quick connect tube
External Leak Integrity

<1 x 10-9 scc/sec He
Wetted Materials

316L SST passivated, Inconel, Incoloy
Seal Material

316 SST nickel plated
Valve Seat Material

PCTFE with Elgiloy® Diaphragm
Surface Finish

<32 µ inches Ra
Dimensions

6.98 x 10.0 x 10.0 in.
Weight

23.9 lbs
Compliance

CE

Specifications

Mass Flow Verification Accuracy

±1.0% of Reading
Mass Flow Verification Range

5 - 3000 sccm (N2 equivalent)
Repeatability

±0.5% of Reading
Reproducibility

±0.3% of Reading
Pressure Range

100 Torr
Pressure Accuracy

0.25% of Reading
Proof Pressure

45 psia
Burst Pressure

150 psig
Minimum Penumatic Air Supply Pressure

80 psig
Maximum Penumatic Air Supply Pressure

100 psig
Span Temperature Coefficient

<0.002% Reading/°C
Warm-up Time

60 minutes
Operating Temperature

10° to 40°C
Temperature Display

0 - 100°C
Temperature Accuracy

± 2°C
Temperature Resolution

0.1°C

Storage Humidity

0 to 95% RH non-condensing
Storage Temperature

-20° to 60°C
Control Interface

DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
Diagnostic Interface

Ethernet RJ-45 female
Input Voltage

11 to 25 VDC
Gas Supply Fitting

Swagelok® compatible 8-VCR® female, rotatable
Vacuum Supply Fitting

Swagelok® compatible 8-VCR® male type, rotatable
Pneumatic Air Supply Fitting

1/8 inch one-touch quick connect tube
External Leak Integrity

<1 x 10-9 scc/sec He
Wetted Materials

316L SST passivated, Inconel, Incoloy
Seal Material

316 SST nickel plated
Valve Seat Material

PCTFE with Elgiloy® Diaphragm
Surface Finish

<32 µ inches Ra
Dimensions

6.98 x 10.0 x 10.0 in.
Weight

23.9 lbs
Compliance

CE

Features

Sonic Flow Technology

The insensitivity of the HA-MFV to external volume is realized through the use on sonic nozzle technology. The sonic nozzle creates a pressure drop and sonic flow conditions. In sonic flow, variations in pressure downstream of the nozzle have no effect on upstream conditions. Thus, the sonic nozzle effectively decouples the measurement in the HA-MFV from the upstream volume.

Better Measurement Accuracy

The HA-MFV is able to provide significantly better measurement accuracy and is insensitive to external volume (volume from MFC to the HA-MFV) conditions and variation. This insensitivity of the HA-MFV to external volume also results in more precise matching of measurements between HA-MFVs on multiple tools for the same process. This assures the user of precise tool-to-tool process matching.