Ozone Gas Generator, 2.5 - 50 slm, Ultra Clean, High Concentration, High Flow
Model: AX8415
Ozone Gas Generator, 2.5 - 50 slm, Ultra Clean, High Concentration, High Flow
Ozone Gas Generator, 2.5 - 50 slm, Ultra Clean, High Concentration, High Flow
Model: AX8415
Overview
Overview
The AX8415 Ultra High Concentration, High Flow Ozone Generator converts oxygen to > 400 g/Nm3  of high concentration ozone for leading-edge applications in the semiconductor, flat panel display, and photovoltaic industries. The technology designed into the AX8415 is the basis of this generator’s versatility.
Technical Specs
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TypeOzone Gas Generator
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Ozone Outputup to 425 g/Nm3 (27.1 wt%)
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Flow Rate2.5 - 50 slm
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Feed GasO2 Grade 6 or better, or N2 100 ppm Grade 5 or better (optional)
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Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
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Pressure20 - 50 psig
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Control InterfaceFront panel control and remote operation
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Cooling Water Temperature5 - 25°C (41 - 77°F)
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Cooling Water Filtration100 microns
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Cooling Water QualityResistivity ≥50 kΩ/cm
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Minimum Water Flow9.4 lpm (2.5 gpm)
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Voltage Requirements208 VAC (±10%)
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Phase3Ø & Ground, no neutral
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Current Requirements20 Amps
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Frequency50/60 Hz
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Weight46.3 kg (102 lbs)
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Dimensions483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in) (width x depth x height)
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ComplianceCE, UL/CSA, SEMI F47 and RoHS
Resources & Downloads
Drawings & CADs
- AX8415 Ozone Generator Dimensional Drawings (374.5 kB, PDF)
Ozone Gas Generator, 2.5 - 50 slm, Ultra Clean, High Concentration, High Flow
Ultra-High Velocity