AX8407 High Flow Ozone Generator
Overview
Ozone is an environmentally friendly alternative to many chemical processes. It has a high redox potential, can be generated at the point of use and is easily converted back to oxygen. Typical semiconductor ozone applications include TEOS/Ozone CVD, Ta2O5 CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, oxide growth, and ALD. Ozone is also ideally suited for use in pharmaceutical and water processing applications including cleaning, sterilization and disinfection, as well as Clean-In-Place (CIP).
The AX8407 generator converts pure oxygen into ozone through silent electrical discharge and achieves high output and high concentration level. It requires only minute levels of dopant nitrogen gas, far below the levels required for competitive ozone generators. As a result, the presence of contaminants, e.g. NOx compounds, is extremely low.
- Ozone concentration up to 335 g/Nm3 or 21.7 wt% at 5°C
- O2 flow rate from 5 slm to 40 slm enables process flexibility
- Patented cell structure design enables production of high concentration ozone
- Closed-loop operation for tighter process control
Products
Specifications
-
TypeOzone Gas Generator
-
Ozone Outputup to 335 g/Nm3
-
Flow Rate5 - 40 slm
-
Feed GasOxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm grade 5 or better N2
-
Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
-
Pressure20 - 30 psig
-
Control InterfaceFront Panel Control and Remote Operation
-
Cooling Water Temperature5 - 25°C (41 - 77°F)
-
Cooling Water Filtration100 microns
-
Cooling Water QualityResistivity ≥50 KΩ/cm
-
Minimum Water Flow7.6 lpm (2.0 gpm) minimum
-
Voltage Requirements208 VAC (±10%)
-
Phase3Ø & Ground, no Neutral
-
Current Requirements15 Amps
-
Frequency50/60 Hz
-
Weight59 kg (130 Lb)
-
Dimensions483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in) (width x depth x height)
-
ComplianceCE, UL/CSA and SEMI F47
Features
Performance Chart — Typical Ozone Output
Resources
Literature
- AX8407 High Flow Ozone Generator (326.5 kB, PDF)
- AX8407 Ozone Generator Equivalent to New Refurbishment Program (2.8 MB, PDF)
Drawings & CADs
- AX8407 Ozone Generator Dimensions (176.4 kB, PDF)
Technical Papers
- Ozone as the Oxidizing Precursor in Atomic Layer Deposition (647.6 kB, PDF)
- Ozone Applications for Atomic Layer Processing (1.5 MB, PDF)
Application Notes
- Ozone Data Conversion Tables (289.1 kB, PDF)
Ultra-High Velocity