AA02A Baratron® 0.1-1000 Torr Heated Absolute Capacitance Manometers
Model: AA02A
AA02A Baratron® 0.1-1000 Torr Heated Absolute Capacitance Manometers
Model: AA02A
Overview
Overview
The AA02A a-Baratron® Heated Absolute Capacitance Manometer is an advanced general purpose absolute heated capacitance manometer developed specifically for use in vacuum and pressure measurement applications where high accuracy and excellent repeatability are crucial to process success. These capacitance manometers are internally heated to 45°, 80°, or 100°C. They use state-of-the-art digital architecture throughout to produce the highest possible long-term performance and reliability. They can be equipped with either the standard sensor or MKS’ patented Etch Baffle sensor technology that greatly reduces process contamination, and they can be configured for both new and existing processing systems. These manometers operate on ±15 VDC or +24 VDC input voltage, and have legacy 0-10 VDC analog serial output signals. Full Scale measurement ranges from 0.1 Torr (13.3 Pa) to 1000 Torr (133.3 kPa) are available.
Technical Specs
- TypePressure Transducer
- Sensor TypeStandard sensor with reduced inlet tube length
- Measurement TypeAbsolute
- Full Scale Range1000 Torr
- Sensor Temperature100°C
- Fitting Type2.75 in. OD CF
- Analog Output0 - 10 VDC
- Electrical Connector15-pin D-sub male with slide locks
- Accuracy45°C Models: 0.10% of Reading for 1 - 1000 Torr, 0.12% of Reading for <1 Torr, 80° and 100°C Models: 0.20% of Reading for 1 - 1000 Torr, 0.40% of Reading for <1 Torr
- Resolution0.002% Full Scale
- Time Constant<20 ms for = 1 Torr, <40 ms for <1 Torr
- Zero Temperature Coefficient45°C Models: 0.002% FS/°C for 1 - 1000 Torr, 0.005% FS/°C for <1 Torr, 80° and 100°C Models: 0.002% FS/°C for 1 - 1000 Torr, 0.01% FS/°C for <1 Torr
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature45°C Models: 15 - 40°C, 80° and 100°C Models: 15 - 50°C
- Overpressure Limit45 psia
- Volume6.3 cm3 (nominal – varies depending on fitting)
- Exposed MaterialsInconel and Incoloy nickel alloys (some optional fittings are made from 300 series stainless steel)
- Power Requirements+24 VDC with trip point option
- Trip PointsTrip A below 50%, Trip B above 50% of FS Range
- Calibration OrientationNot Required
- UnitskPa
- ComplianceCE
Technical Specs
- TypePressure Transducer
- Sensor TypeStandard sensor with reduced inlet tube length
- Measurement TypeAbsolute
- Full Scale Range1000 Torr
- Sensor Temperature100°C
- Fitting Type2.75 in. OD CF
- Analog Output0 - 10 VDC
- Electrical Connector15-pin D-sub male with slide locks
- Accuracy45°C Models: 0.10% of Reading for 1 - 1000 Torr, 0.12% of Reading for <1 Torr, 80° and 100°C Models: 0.20% of Reading for 1 - 1000 Torr, 0.40% of Reading for <1 Torr
- Resolution0.002% Full Scale
- Time Constant<20 ms for = 1 Torr, <40 ms for <1 Torr
- Zero Temperature Coefficient45°C Models: 0.002% FS/°C for 1 - 1000 Torr, 0.005% FS/°C for <1 Torr, 80° and 100°C Models: 0.002% FS/°C for 1 - 1000 Torr, 0.01% FS/°C for <1 Torr
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature45°C Models: 15 - 40°C, 80° and 100°C Models: 15 - 50°C
- Overpressure Limit45 psia
- Volume6.3 cm3 (nominal – varies depending on fitting)
- Exposed MaterialsInconel and Incoloy nickel alloys (some optional fittings are made from 300 series stainless steel)
- Power Requirements+24 VDC with trip point option
- Trip PointsTrip A below 50%, Trip B above 50% of FS Range
- Calibration OrientationNot Required
- UnitskPa
- ComplianceCE
Resources & Downloads
Drawings & CADs
AA02 Baratron® Dimensional Drawings(449.6 kB, PDF)