972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Model: 972B
972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Model: 972B

Overview
Overview
The 972B DualMag Cold Cathode Vacuum Transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and it combines cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure. The MicroPirani offers 1-2 decades lower measuring range than a traditional pirani gauge, subsequently by lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended. The Series 970B has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The Series 970B have standard 15 pin HD SUBD connector and an analog output voltage pressure signal of 0.5VDC/decade. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software. Contact MKS technical support for details. The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
Technical Specs
- Absolute Measurement Range1.0 x 10-8 to 760 Torr
- Digital CommunicationRS485
- TypeVacuum Transducer
- SensorCold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
- DisplayNo
- Seal MaterialViton
- EnclosureIP54
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceEtherCAT/analog
- Relays3 dual analog output, Piezo differential
- Fitting Type2.75 in. CF
- Installation OrientationAny
- Set Point Range1 x 10-8 Torr to Atmosphere Absolute
- Calibration GasNitrogen
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
- Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
- Analog Output0.5 VDC per Decade
- Relay Contact Rating1 A @ 30VAC/DC, resistive
- Power Requirements9 - 30 VDC, 2 Watts
- Accuracy5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
- Repeatability5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±2% of Reading (Typical) Combined Absolute
- Overpressure Limit1500 Torr
- Internal Volume21 cm3
- Exposed Materials304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Enclosure, DisplayIP54
Technical Specs
- Absolute Measurement Range1.0 x 10-8 to 760 Torr
- Digital CommunicationRS485
- TypeVacuum Transducer
- SensorCold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
- DisplayNo
- Seal MaterialViton
- EnclosureIP54
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceEtherCAT/analog
- Relays3 dual analog output, Piezo differential
- Fitting Type2.75 in. CF
- Installation OrientationAny
- Set Point Range1 x 10-8 Torr to Atmosphere Absolute
- Calibration GasNitrogen
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
- Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
- Analog Output0.5 VDC per Decade
- Relay Contact Rating1 A @ 30VAC/DC, resistive
- Power Requirements9 - 30 VDC, 2 Watts
- Accuracy5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
- Repeatability5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±2% of Reading (Typical) Combined Absolute
- Overpressure Limit1500 Torr
- Internal Volume21 cm3
- Exposed Materials304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Enclosure, DisplayIP54
Resources & Downloads
Literature
970 Cold Cathode Transducers(250.9 kB, PDF)
