The 972B-22030 DualMag Cold Cathode Vacuum Transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and features a size NW25 ISO-KF flange fitting. It has an RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. Three included mechanical relays can be used for process control like interlocking valves or pumps. DualMag transducers combine cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure. The MicroPirani offers 1-2 decades lower measuring range than a traditional pirani gauge, subsequently by lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.
Cold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
Display
No
Seal Material
Viton
Enclosure
Standard
Electrical Connector
15-pin, High Density, D-sub male
Interface
RS485/analog
Relays
3
Fitting Type
NW25 ISO-KF
Installation Orientation
Any
Set Point Range
1 x 10-8 Torr to Atmosphere Absolute
Calibration Gas
Nitrogen
Operating Temperature
0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature
85°C (185°F)
Digital Controls
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
Digital Status
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Analog Output
0.5 VDC per Decade
Relay Contact Rating
1 A @ 30VAC/DC, resistive
Power Requirements
9 - 30 VDC, 2 Watts
Accuracy
5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
Repeatability
5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±2% of Reading (Typical) Combined Absolute
Cold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
Display
No
Seal Material
Viton
Enclosure
Standard
Electrical Connector
15-pin, High Density, D-sub male
Interface
RS485/analog
Relays
3
Fitting Type
NW25 ISO-KF
Installation Orientation
Any
Set Point Range
1 x 10-8 Torr to Atmosphere Absolute
Calibration Gas
Nitrogen
Operating Temperature
0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature
85°C (185°F)
Digital Controls
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
Digital Status
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Analog Output
0.5 VDC per Decade
Relay Contact Rating
1 A @ 30VAC/DC, resistive
Power Requirements
9 - 30 VDC, 2 Watts
Accuracy
5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
Repeatability
5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±2% of Reading (Typical) Combined Absolute
Additional CAD file downloads are not available for this product.
972B-22030 - Drawings
Additional drawings are not available for this product.
972B-22030
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