902B Absolute Piezo Vacuum Transducers
Model: 902B
902B Absolute Piezo Vacuum Transducers
Model: 902B

Overview
Overview
The Series 902B Absolute Piezo Vacuum Transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B provides economical, absolute pressure measurement that is independent of gas type. With a measurement range of 0.1 to 1000 Torr Full Scale, the sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace. The Series 902B Piezo transducer is based on a silicon piezo resistive pressure sensor that measures absolute vacuum pressure with an accuracy of ±1% of Reading (from 10-1000 Torr). The sensor is robust and resistant to mechanical vibration and g-forces. Furthermore, the sensor technology makes the transducer gas type independent. With only stainless steel 316 exposed to the process gas, the transducer can be used in many demanding applications. The 902B is available with an RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. In addition, the 902B has a 16 bit analog pressure output that can be interfaced to external analog equipment for pressure readout or close loop control. The standard output is linear from 0-10 VDC, but other outputs are also available. The 902B has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. The SPDT relays include both normally open and close contacts and can be set to energize above or below a set point trip value. Many applications require continuous surveillance of system pressure and warning of atypical pressure levels. The flexible relay options of the 902B can provide warning to external safety logic in cases of abnormal pressure and loss of power. The display option offers real time readout of measured pressure, view of transducer settings and set point status. The compact design of the 902B significantly reduces the amount of space occupied by the transducer. This is particularly appealing to system designers and allows design of compact systems or equipment. The 902B is also available in a 9 pin version, offering backward compatibility with the first generation 902. The 902B can be used as a standalone device or together with the PDR900 controller.
Technical Specs
- Absolute Measurement Range0.1 to 1000 Torr
- Digital CommunicationEtherCAT
- TypeVacuum Transducer
- SensorStainless steel enclosed Piezo (Absolute Pressure)
- DisplayTouch-screen Display
- InterfaceEtherCAT/analog
- Fitting Type0.125 in. NPT male
- Installation OrientationAny
- Set Point Range1-1000 Torr
- Operating Temperature0-40°C (32 - 104°F)
- Maximum Bakeout Temperature100°C (non-operating)
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable
- Digital StatusPressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog Output ResolutionPrimary: 16 bit, Secondary: 12 bit
- Relay Contact Rating1 A @ 30 VAC/VDC resistive
- Relay Response100 msec maximum
- Power Requirements9-30 VDC <1.2 Watts maximum
- Accuracy10-1000 Torr ±1% of Reading
- Repeatability±0.3% of Reading
- Overpressure Limit1500 Torr
- Exposed Materials316 Stainless Steel
- Electronic Casing and Flange304 Stainless steel
- ComplianceCE
- Connector, RelaysD-Sub 15 pin HD male, 1 relay (EtherCAT only)
- Enclosure, DisplayIP40 Enclosure, with display (SI units)
- Digital Output Resolution0.1 Torr
- Zero Temperature Coefficient0.01% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
Technical Specs
- Absolute Measurement Range0.1 to 1000 Torr
- Digital CommunicationEtherCAT
- TypeVacuum Transducer
- SensorStainless steel enclosed Piezo (Absolute Pressure)
- DisplayTouch-screen Display
- InterfaceEtherCAT/analog
- Fitting Type0.125 in. NPT male
- Installation OrientationAny
- Set Point Range1-1000 Torr
- Operating Temperature0-40°C (32 - 104°F)
- Maximum Bakeout Temperature100°C (non-operating)
- Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable
- Digital StatusPressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
- Analog Output ResolutionPrimary: 16 bit, Secondary: 12 bit
- Relay Contact Rating1 A @ 30 VAC/VDC resistive
- Relay Response100 msec maximum
- Power Requirements9-30 VDC <1.2 Watts maximum
- Accuracy10-1000 Torr ±1% of Reading
- Repeatability±0.3% of Reading
- Overpressure Limit1500 Torr
- Exposed Materials316 Stainless Steel
- Electronic Casing and Flange304 Stainless steel
- ComplianceCE
- Connector, RelaysD-Sub 15 pin HD male, 1 relay (EtherCAT only)
- Enclosure, DisplayIP40 Enclosure, with display (SI units)
- Digital Output Resolution0.1 Torr
- Zero Temperature Coefficient0.01% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
Resources & Downloads
Drawings & CADs
902B Transducer Dimensional Drawing(74.3 kB, PDF)
