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The 1579A01322LR1BV mass flow controller comes with a Full Scale range of 200 slm of N2, 8 VCR male fittings, a 15-pin D-subminiature connector, and a 0-5 VDC flow input/output signal. in a compact design. The 1579 is based on proven MKS technology and offers a fast controller settling time as well as high accuracy in the entire control range. This makes it possible to integrate the 1579 into fast cycle processes in which the idle time for the stabilization of the process conditions has to be minimal and reproducible. Due to its compact design, the 1579 allows space-saving designs of gas supply systems.