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150/160 Series Bellows Vacuum Isolation Valves

Products
Configuration Options
Features
Accessories
Resources
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Overview

150/160 Series single-stage vacuum isolation valves are designed with a formed stainless-steel bellows to prevent outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional O-ring shaft sealed valve.

NW16 - NW160
Designed to ensure product quality, reliability, and value
Dual acting pneumatic operation available in select sizes

See All Features

Products

Compare	Description	Compatibility	rankScore	Body Configuration	Type	Actuation	Port Size	Flange Type	Availability	Price
152-0016K Vacuum Valve, Pneumatic, Angle, ISO NW16 Flanges $441 14 Weeks	152-0016K Vacuum Valve, Pneumatic, Angle, ISO NW16 Flanges	UNIVERSAL	1.0	Angle	Vacuum Isolation Valve	Pneumatic	0.75 in.	ISO-KF	14 Weeks	$441
152-0025K Vacuum Valve, Pneumatic, Angle, ISO NW25 Flanges $492 14 Weeks	152-0025K Vacuum Valve, Pneumatic, Angle, ISO NW25 Flanges	UNIVERSAL	1.0	Angle	Vacuum Isolation Valve	Pneumatic	1.0 in.	ISO-KF	14 Weeks	$492
152-0040K Vacuum Valve, Angle, Pneumatic, ISO NW40 Flanges $524 14 Weeks	152-0040K Vacuum Valve, Angle, Pneumatic, ISO NW40 Flanges	UNIVERSAL	1.0	Angle	Vacuum Isolation Valve	Pneumatic	1.5 in.	ISO-KF	14 Weeks	$524
161-0025K Vacuum Valve, Inline, Manual, ISO NW25 Flanges $473 Contact Us	161-0025K Vacuum Valve, Inline, Manual, ISO NW25 Flanges	UNIVERSAL	1.0	Inline	Vacuum Isolation Valve	Manual	1.0 in.	ISO-KF	Contact Us	$473
162-0016K Vacuum Valve, Pneumatic, Inline, ISO NW16 Flanges $524 14 Weeks	162-0016K Vacuum Valve, Pneumatic, Inline, ISO NW16 Flanges	UNIVERSAL	1.0	Inline	Vacuum Isolation Valve	Pneumatic	0.75 in.	ISO-KF	14 Weeks	$524
162-1040K Vacuum Valve, Inline, Pneumatic, ISO NW40 Flanges, Limit Switch $657 14 Weeks	162-1040K Vacuum Valve, Inline, Pneumatic, ISO NW40 Flanges, Limit Switch	UNIVERSAL	1.0	Inline	Vacuum Isolation Valve	Pneumatic	1.5 in.	ISO-KF	14 Weeks	$657

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Configuration Options

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	Description
	150-160-VALVE Vacuum Isolation Valve, Single-Stage, Bellows-Sealed

Specifications

Type

Standard Vacuum Isolation Valves
Vacuum Range

15 psig to 1.0 x 10^-9 Torr
Body Configuration

Angle or Inline
Helium Leak Rate

1.0 x 10^-9 std cc/sec
Actuation

Manual or Pneumatic
Body, Nosepiece and Bellows Termination Material

Type 304 stainless steel
Bellows Material

Type 321 stainless steel

Nose Seal

Viton®
Bonnet Seal

Viton®
Limit Switch Rating

5A - 250 VAC
Single Pole, Single Throw

5A - 30 VDC
Maximum Bakeout Temperature

Body: 150°C
Cylinder: 70°C
Piston Material

Anodized aluminum alloys, Buna and plated steel

Specifications

Type

Standard Vacuum Isolation Valves
Vacuum Range

15 psig to 1.0 x 10^-9 Torr
Body Configuration

Angle or Inline
Helium Leak Rate

1.0 x 10^-9 std cc/sec
Actuation

Manual or Pneumatic
Body, Nosepiece and Bellows Termination Material

Type 304 stainless steel
Bellows Material

Type 321 stainless steel

Nose Seal

Viton®
Bonnet Seal

Viton®
Limit Switch Rating

5A - 250 VAC
Single Pole, Single Throw

5A - 30 VDC
Maximum Bakeout Temperature

Body: 150°C
Cylinder: 70°C
Piston Material

Anodized aluminum alloys, Buna and plated steel

Features

Formed Bellows

Since bellows are a critical factor in valve reliability, MKS incorporates formed bellows into the 150/160 valves. The first major advantage of using formed bellows is consistency. Since formed bellows do not have welds joining each membrane, there is no stress concentration and fatigue failure from non-uniform welds. The second advantage is that the bellows convolutions never touch completely in the compressed position. Many vacuum processes, like chemical vapor or thin film deposition contain particulate contamination. If small particles fall between formed bellows, they have no effect. If similar particles fall between welded, nested bellows, they deform the membranes, cause stress concentration, and lead to early bellows failure.

Install In Any Position

MKS vacuum valves may be installed in any position, with either the bellows or the nosepiece facing the pump. In systems with condensable materials, it is advantageous to install the valve with the nosepiece toward the chamber. The electropneumatic valve has a solenoid valve attached to the cylinder with a nipple. The cap screws fixing the cylinder to the body may be removed and the cylinder indexed at 90° increments for valves of sizes .75'' to 1.5'', and 60° increments for valves with port sizes 2'' to 6''. If necessary, the solenoid valve can be removed and located remotely.

Applications

Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.

Features

Formed Bellows

Install In Any Position

Applications

Accessories

Replacement Solenoids

Description	Compatibility	Avail.	Price
100008165 Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	14 Weeks	$195
100008163 Solenoid Valve, Replacement, 24 VDC, 7 Watt	UNIVERSAL	14 Weeks	$153
100008164 Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt	UNIVERSAL	14 Weeks	$200
100008539 Solenoid Valve, Replacement, 12 VDC, 7 Watt	UNIVERSAL	14 Weeks	$105
100008167 Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	14 Weeks	$170
100008166 Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	14 Weeks	$145

Valve Seals

Description	Compatibility	Avail.	Price
100001699 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW16 Port	UNIVERSAL	4 Weeks	$28
100001700 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW25 Port	UNIVERSAL	4 Weeks	$29
100001701 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW40 Port	UNIVERSAL	4 Weeks	$30
100001702 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW50 Port	UNIVERSAL	4 Weeks	$33
100001703 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW63 Port	UNIVERSAL	4 Weeks	$34
100001704 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW80 Port	UNIVERSAL	4 Weeks	$35
100001691 Viton Seal Set, 150, 160 Valves, NW80 Port	UNIVERSAL	4 Weeks	$62
100001674 Viton Seal Set, Series 150, 160, Vacuum Valves, NW25 Port	UNIVERSAL	4 Weeks	$34
100001676 Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW50 Port	UNIVERSAL	4 Weeks	$50
100001673 Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW16 Port	UNIVERSAL	4 Weeks	$33
100001677 Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW63 Port	UNIVERSAL	4 Weeks	$57
100001675 Viton Seal Set, 150, 160 Vacuum Valves, NW40 Port	UNIVERSAL	4 Weeks	$39
100006113 Viton Seal Set, 150, 160 Valves, NW160 Port	UNIVERSAL	4 Weeks	$215
100003876 Viton Seal Set, Series 150 or 160 Pneumatic Vacuum Valves, NW100 Port	UNIVERSAL	4 Weeks	$69

Limit Switches

Description	Compatibility	Avail.	Price
100001682 Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW16	UNIVERSAL	4 Weeks	$145
100001520 Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40	UNIVERSAL	4 Weeks	$88
100001683 Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63	UNIVERSAL	4 Weeks	$120
100001684 Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80	UNIVERSAL	4 Weeks	$120
100003663 Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100	UNIVERSAL	4 Weeks	$130
100005802 Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW160	UNIVERSAL	4 Weeks	$165

Internal Rebuild Kits

Description	Compatibility	Avail.	Price
100006122 Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW16	UNIVERSAL	4 Weeks	$305
100006123 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Pneumatic Valves, NW25	UNIVERSAL	4 Weeks	$321
100006124 Valve Rebuild Kit, Viton Seal Set, 150, 160 Valves, NW40	UNIVERSAL	4 Weeks	$370
100006125 Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW50	UNIVERSAL	4 Weeks	$505
100006126 Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW63	UNIVERSAL	4 Weeks	$590
100006128 Valve Rebuild Kit with Viton Seal Set, 150 or 160 Pneumatic Valves, NW100	UNIVERSAL	4 Weeks	$850
100006127 Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW80	UNIVERSAL	4 Weeks	$700
100006129 Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW160	UNIVERSAL	4 Weeks	$1,725
100008414 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW25	UNIVERSAL	4 Weeks	$289
100008413 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW16	UNIVERSAL	4 Weeks	$268
100008415 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW40	UNIVERSAL	4 Weeks	$294
100008416 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW50	UNIVERSAL	4 Weeks	$483
100008418 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW80	UNIVERSAL	4 Weeks	$562
100008417 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Manual Valves, NW63	UNIVERSAL	4 Weeks	$515

Resources

Literature

Series 150/160 and V-100 Valves (496.9 kB, PDF)

Manuals

Series 150 and 160 Poppet Vacuum Valve Manual (765.7 kB, PDF)

Resources

Literature

Series 150/160 and V-100 Valves (496.9 kB, PDF)

Manuals

Series 150 and 160 Poppet Vacuum Valve Manual (765.7 kB, PDF)

Need help?

Contact an Applications Specialist by sending us an email

150/160 Series Bellows Vacuum Isolation Valves

150/160 Series Bellows Vacuum Isolation Valves

Overview

Products

Configuration Options

Specifications

Specifications

Features

Formed Bellows

Install In Any Position

Applications

Features

Formed Bellows

Install In Any Position

Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Resources

Literature

Manuals

Resources

Literature

Manuals

V-100 Bellows Vacuum Isolation Valves

LoPro™ Bellows Vacuum Isolation Valves

Cv™ Compact Bellows Vacuum Isolation Valves

CRV Corrosion Resistant Vacuum Isolation Valves

V-100 Bellows Vacuum Isolation Valves

LoPro™ Bellows Vacuum Isolation Valves

Cv™ Compact Bellows Vacuum Isolation Valves

CRV Corrosion Resistant Vacuum Isolation Valves

Need help?

Product Comparison

150/160 Series Bellows Vacuum Isolation Valves

150/160 Series Bellows Vacuum Isolation Valves

Overview

Products

Configuration Options

Specifications

Features

Formed Bellows

Install In Any Position

Applications

Formed Bellows

Install In Any Position

Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Resources

Literature

Manuals

Literature

Manuals

Related Products

Need help?