V-100 Bellows Vacuum Isolation Valve

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Overview

V-100 Bellows Vacuum Isolation Valve is a 4-inch valve that is available in both manual and pneumatic options, and either angle or inline configurations. A formed stainless-steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valves cycle life over a conventional o-ring shaft-sealed valve.

NW100
Designed to ensure product quality, reliability, and value
Spring-closed, air-open

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Description
V100-VALVE Standard Vacuum Valve, NW100 Port

Specifications

Type

Large Standard Single-stage Vacuum Isolation Valves
Vacuum Range

15 psig to 10^-9 Torr
Body Configuration

Angle, Inline
Port Size

NW100
Flange Size

MF100, CF 6 inch, KF100, 4 inch tube
Helium Leak Rate

1.0 x 10^-9 std cc/sec
Actuation

Manual or Pneumatic
Body, Nosepiece and Bellows Termination Material

Type 304 stainless steel
Bellows Material

Type 321 stainless steel
Nose Seal

Viton®, Buna, Kalrez, or Chemraz
Bonnet Seal

Viton®, Buna, Kalrez, or Chemraz

Cylinder Volume

1.6 x 10^-2 ft³ (4.6 x 10^-4 m³)
Cylinder Air Pressure

Minimum: 50 psig (4.5 x 105 N/m² abs)
Maximum: 100 psig (7.9 x 105 N/m² abs)
Limit Switch Rating

5A - 250 VAC
Single Pole, Single Throw

5A - 30 VDC
Blow-By Pressure

32 psia (2.2 x 10⁵ N/m² abs)
Actuation Time

Opening: 2, Closing: 2
Maximum Internal Spring Closing Pressure

30 psia (2.0 x 10⁵ N/m² abs)
Maximum Bakeout Temperature

150°C
Conductance

Angle: 390 ltr/sec, Inline: 360 ltr/sec
Pneumatic Air Supply Fitting

1/8 in. NPT-F

Features

Applications

Series 150/160 and V-100 valves are designed to insure product quality, reliability and value. They function reliably in applications ranging from semiconductor manufacturing to plasma physics research to nuclear accelerators. MKS manufactures its valves with interchangeable parts, inspecting them at every step.

Accessories

Replacement Solenoids

Description	Compatibility	Avail.	Price
100008163 Solenoid Valve, Replacement, 24 VDC, 7 Watt	UNIVERSAL	14 Weeks	$168
100008164 Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt	UNIVERSAL	15 Weeks	$210
100008166 Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	15 Weeks	$145
100008165 Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	14 Weeks	$221
100008167 Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	15 Weeks	$180
100008539 Solenoid Valve, Replacement, 12 VDC, 7 Watt	UNIVERSAL	15 Weeks	$105

Valve Seals

Description	Compatibility	Avail.	Price
100001702 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW50 Port	UNIVERSAL	4 Weeks	$33
100001700 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW25 Port	UNIVERSAL	4 Weeks	$29
100001701 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW40 Port	UNIVERSAL	4 Weeks	$30
100001703 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW63 Port	UNIVERSAL	4 Weeks	$34
100001699 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW16 Port	UNIVERSAL	4 Weeks	$28
100001704 Viton Seal Set, 150, 160 and V-100 Manual Valves, NW80 Port	UNIVERSAL	4 Weeks	$35
100001674 Viton Seal Set, Series 150, 160, Vacuum Valves, NW25 Port	UNIVERSAL	4 Weeks	$36
100001675 Viton Seal Set, 150, 160 Vacuum Valves, NW40 Port	UNIVERSAL	4 Weeks	$41
100001673 Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW16 Port	UNIVERSAL	4 Weeks	$33
100001676 Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW50 Port	UNIVERSAL	4 Weeks	$50
100001677 Viton Seal Set, Series 150, 160, V-100 Vacuum Valves, NW63 Port	UNIVERSAL	4 Weeks	$57
100001691 Viton Seal Set, 150, 160 Valves, NW80 Port	UNIVERSAL	4 Weeks	$62
100006113 Viton Seal Set, 150, 160 Valves, NW160 Port	UNIVERSAL	4 Weeks	$230

Limit Switches

Description	Compatibility	Avail.	Price
100001682 Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW16	UNIVERSAL	4 Weeks	$150
100001684 Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80	UNIVERSAL	4 Weeks	$125
100003663 Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100	UNIVERSAL	4 Weeks	$140
100005802 Limit Switch Kit, 150, 160, V-100 Pneumatic Valves, NW160	UNIVERSAL	4 Weeks	$170
100001520 Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40	UNIVERSAL	4 Weeks	$92
100001683 Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63	UNIVERSAL	4 Weeks	$125

Internal Rebuild Kits

Description	Compatibility	Avail.	Price
100006122 Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW16	UNIVERSAL	4 Weeks	$305
100006124 Valve Rebuild Kit, Viton Seal Set, 150, 160 Valves, NW40	UNIVERSAL	4 Weeks	$390
100006125 Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW50	UNIVERSAL	4 Weeks	$530
100006126 Valve Rebuild Kit with Viton Seal Set, 150, 160 Valves, NW63	UNIVERSAL	4 Weeks	$610
100006123 Valve Rebuild Kit with Viton Seal Set, 150, 160, V-100 Pneumatic Valves, NW25	UNIVERSAL	4 Weeks	$321
100006127 Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW80	UNIVERSAL	4 Weeks	$730
100006128 Valve Rebuild Kit with Viton Seal Set, 150 or 160 Pneumatic Valves, NW100	UNIVERSAL	4 Weeks	$880
100006129 Valve Rebuild Kit with Viton Seal Set, 150, 160 or V-100 Pneumatic Valves, NW160	UNIVERSAL	4 Weeks	$1,780

Resources

Literature

Series 150/160 and V-100 Valves (496.9 kB, PDF)

V-100 Bellows Vacuum Isolation Valve

V-100 Bellows Vacuum Isolation Valve

Overview

Products

Configuration Options

Specifications

Features

Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Resources

Literature

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Product Comparison

V-100 Bellows Vacuum Isolation Valve

V-100 Bellows Vacuum Isolation Valve

Overview

Products

Configuration Options

Specifications

Features

Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Resources

Literature

Related Products

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