The 100006122 Vacuum Valve Internal Assembly Kit includes a Viton seal set. It is designed for single-stage series 150, 160, V-100 pneumatic vacuum valves with a size NW16 port.
100006122 is compatible with these MKS valves:
152-0016C | 152-0016K | 152-0016T | 152-1016C |
152-1016K | 152-1016T | 153-0016C-100V/50 | 153-0016C-120V/50-60 |
153-0016C-208V/50-60 | 153-0016C-220V/50-60 | 153-0016C-24V/50-60 | 153-0016C-24VDC |
153-0016K-100V/50 | 153-0016K-120V/50-60 | 153-0016K-208V/50-60 | 153-0016K-220V/50-60 |
153-0016K-24V/50-60 | 153-0016K-24VDC | 153-0016T-100V/50 | 153-0016T-120V/50-60 |
153-0016T-208V/50-60 | 153-0016T-220V/50-60 | 153-0016T-24V/50-60 | 153-0016T-24VDC |
153-1016C-100V/50 | 153-1016C-120V/50-60 | 153-1016C-208V/50-60 | 153-1016C-220V/50-60 |
153-1016C-24V/50-60 | 153-1016C-24VDC | 153-1016K-100V/50 | 153-1016K-120V/50-60 |
153-1016K-208V/50-60 | 153-1016K-220V/50-60 | 153-1016K-24V/50-60 | 153-1016K-24VDC |
153-1016T-100V/50 | 153-1016T-120V/50-60 | 153-1016T-208V/50-60 | 153-1016T-220V/50-60 |
153-1016T-24V/50-60 | 153-1016T-24VDC | 162-0016C | 162-0016K |
162-0016T | 162-1016C | 162-1016K | 162-1016T |
163-0016C-100V/50 | 163-0016C-120V/50-60 | 163-0016C-208V/50-60 | 163-0016C-220V/50-60 |
163-0016C-24V/50-60 | 163-0016C-24VDC | 163-0016K-100V/50 | 163-0016K-120V/50-60 |
163-0016K-208V/50-60 | 163-0016K-220V/50-60 | 163-0016K-24V/50-60 | 163-0016K-24VDC |
163-0016T-100V/50 | 163-0016T-120V/50-60 | 163-0016T-208V/50-60 | 163-0016T-220V/50-60 |
163-0016T-24V/50-60 | 163-0016T-24VDC | 163-1016C-100V/50 | 163-1016C-120V/50-60 |
163-1016C-208V/50-60 | 163-1016C-220V/50-60 | 163-1016C-24V/50-60 | 163-1016C-24VDC |
163-1016K-100V/50 | 163-1016K-120V/50-60 | 163-1016K-208V/50-60 | 163-1016K-220V/50-60 |
163-1016K-24V/50-60 | 163-1016K-24VDC | 163-1016T-100V/50 | 163-1016T-120V/50-60 |
163-1016T-208V/50-60 | 163-1016T-220V/50-60 | 163-1016T-24V/50-60 | 163-1016T-24VDC |