High Vacuum Ball Valves
Overview
MKS offers a full suite of 2 and 3-way high vacuum ball valves with either manual or pneumatic actuation. 2-way Vacuum Isolation Ball Valves are designed to have the ball contained in a central vacuum cavity and is opened and closed by turning the stem 90° back and forth (1/4 turn). Flow through a 3-way valve is diverted manually or pneumatically by quarter turn as well. During actuation, the Teflon seats wipe across the ball, reducing particulate build-up and making these valves robust in particle-rich effluent streams and particularly useful in "dirty" vacuum applications.
- NW16 - NW100
- Designed with straight-through flow paths and less sensitive to contamination
- 2-way and 3-way ports
Products
| Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|
| 100015828 High Vacuum Ball Valve, 2-way, Manual, NW16 Port, ISO-KF Flange | $365 |
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| 100015830 High Vacuum Ball Valve, 2-way, Pneumatic, NW16 Port, ISO-KF Flange |
4 Weeks
|
$2,800 |
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| 100015831 High Vacuum Ball Valve, 2-way, Manual, NW25 Port, ISO-KF Flange |
4 Weeks
|
$519 |
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| 100015833 High Vacuum Ball Valve, 2-way, Pneumatic, NW25 Port, ISO-KF Flange | $1,489 |
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| 100015777 High Vacuum Ball Valve, 2-way, Manual, NW40 Port, ISO-KF Flange |
8 Weeks
|
$1,032 |
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| 100015778 High Vacuum Ball Valve, 2-way, Pneumatic, NW40 Port, ISO-KF Flange |
6 Weeks
|
$2,178 |
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| 100016318 High Vacuum Ball Valve, 2-way, Manual, NW50 Port, ISO-KF Flange | $3,350 |
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| 100016319 High Vacuum Ball Valve, 2-way, Pneumatic, NW50 Port, ISO-KF Flange |
4 Weeks
|
$3,116 |
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| BALL-33893 High Vacuum Ball Valve, 2-way, Manual, NW63 Port, ISO-MF Flange | $4,463 |
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| BALL-33894 High Vacuum Ball Valve, 2-way, Pneumatic, NW63 Port, ISO-MF Flange |
15 Weeks
|
$4,383 |
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| BALL-33896 High Vacuum Ball Valve, 2-way, Manual, NW80 Port, ISO-MF Flange | $5,224 |
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| BALL-33897 High Vacuum Ball Valve, 2-way, Pneumatic, NW80 Port, ISO-MF Flange |
15 Weeks
|
$5,292 |
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| BALL-33899 High Vacuum Ball Valve, 2-way, Manual, NW100 Port, ISO-MF Flange | $5,733 |
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| BALL-33900 High Vacuum Ball Valve, 2-way, Pneumatic, NW100 Port, ISO-MF Flange |
15 Weeks
|
$6,561 |
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| BALL-33408 High Vacuum Ball Valve, 3-Way, Manual, KF40 |
6 Weeks
|
$2,729 |
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| BALL-33412 High Vacuum Ball Valve, 3-Way, Pneumatic, KF40 |
15 Weeks
|
$3,528 |
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| BALL-33416 High Vacuum Ball Valve, 3-Way, Manual, KF50 | $2,867 |
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| BALL-33420 High Vacuum Ball Valve, 3-Way, Pneumatic, KF50 | $3,667 |
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Specifications
-
TypeBall Valve
-
Vacuum Range3 Way Valve: Rated to 1 x 10-8 Torr
-
Helium Leak Rate2 Way Valve: Less than 1 X 10-9 std.cc/sec.
3 Way Valve: Rated < 1 x 10^-9 std. ss/sec -
Body Materials316L Stainless Steel
-
Seal2 Way Valve: Stem: Viton® stem seal
3 Way Valve: Fluoroelastomer
(standard - Other material available) -
SeatTeflon® (standard - Other material available)
-
Lubricant3 Way Valve: Dow Corning® High Vacuum Grease
-
Solenoid Voltage3 Way Valve: 120VAC, 240VAC or 24VDC
-
Actuator Operating Pressure3 Way Valve: 80-120 psig (pneumatic valves)
-
Maximum Bakeout Temperature150°C
-
Connection Ports0.75 - 4.0 inches
-
Actuation Options2-Way Valve: Manual, Air-Open, Spring-Close (Air-Close, Spring-Open), Air-Open, Air-Close (Call for Availability)
3 Way Valve: Single Acting: Air-to-Open, Spring-to-Close, Double Acting: Air-to-Open, Air-to-Close -
Actuator Temperature Range3 Way Valve: Moist Air: 0 to 150°C (32 to 302°F)
Dry Air: -20 to 150°C (-4 to 302°F) -
Air Line Hook-up3 Way Valve: 1/8 NPT
-
Maximum Operating Temperature150°C
Resources
Literature
- 2-Way High Vacuum Ball Valves (250.8 kB, PDF)
- 3-Way High Vacuum Ball Valves (267.5 kB, PDF)
Ultra-High Velocity