Configuration Options

   HBALL-VALVE Ball Valve, Heated, Manual or Pneumatic


  • Type
    Heated Ball Valve
  • Helium Leak Rate
    Less than 1 x 10-9
  • Body Materials
    316L stainless steel
  • Seal
    Viton® stem seal standard
    Other material available
  • Seat
    Teflon® seats standard
    Other material available
  • Actuator Operating Pressure
    80-120 psig
  • Maximum Bakeout Temperature
  • Pre-Set Temperature
    150°C (302°F)
  • Heater Set Points
    105°C (221°F)
  • Heater Interior Range
    Ambient to 150°C (302°F)
  • Heater Materials
    Molded silicone foam, fiberglass reinforced silicone, Teflon insulated wire
  • Heater Exterior Range
    Ambient to 70°C (158°F)
  • Heater Foam Thickness
    0.5 in. (12.7 mm)
  • Heater Compliance
    CE, SEMI S2, UL E52951, cUL E5295
  • Heater Connectors
    Molex Mini-Fit Jr.
  • Heater Weight Range
    0.5 to 6.2 lb (0.73 to 2.8 kg)
  • Connection Ports
    1.5 or 2.0 inches, depending on configuration


Ball Valve Design

Ball valves are made of a body, stem, ball, and end caps. The ball is sealed within the body by end caps creating a vacuum tight central cavity. The valve is opened and closed by turning the stem 90° back and forth (1/4 turn). The sealing seat for the ball wipes the ball clean as it is opened and closed. This feature provides the ''self-cleaning'' action that makes this valve robust in particle-rich effluent streams. Pneumatic actuators are available.

Ball Valve Heaters

Ball Valves are specifically designed to withstand internal temperatures as high as 150°C to limit contaminant buildup and reduce system maintenance. Ball valves are heated with MKS Series heaters.The heaters’ molded shapes conform to the hardware, minimizing gaps and subsequent heat loss. Using a patented process, silicone foam insulation is bonded to the outside of a reinforced silicone heater mat, resulting in external temperatures that are safe for human contact and meet OSHA safety requirements.


Ball Valves offer straight-through, unimpeded flow with a minimal valve body footprint. Because of their unique design, ball valves are less sensitive than other vacuum valves to particulate contamination and, therefore, are especially useful in dirty vacuum applications. For example, ball valves are almost always used to isolate scrubbers and traps downstream of the rough pumping system.

Need help?

Contact an Applications Specialist by sending us an email