The G-Series GM100A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
The following options are available for GM100A Metal-sealed 50-100 slm Mass Flow Controllers
Ordering Code Example: GM100A013105T6MB020
Configuration Option |
Option Code |
---|---|
GM100A Mass Flow Controller | GM100A |
Gas (Per Semi Standard E52-0703) |
|
Nitrogen (N2) | 013 |
Ammonia (NH3) | 029 |
Sulfur Hexafluoride (SF6) | 110 |
Other Gas Options | See Here |
Flow Range Full Scale |
|
50000 sccm | 504 |
75000 sccm | 754 |
100000 sccm | 105 |
Fittings (compatible with) |
|
10 mm Swagelok | P |
12 mm Swagelok | F |
1/2 in. Swagelok | K |
3/8 in. Swagelok | J |
4 VCR Male | R |
8 VCR Male | T |
8 VCO Male | D |
NW16 ISO-KF | U |
Connector |
|
EtherCAT | 8 |
DeviceNet | 6 |
RS485 (uses 9 pin connector) | 5 |
Profibus (1480 Compatible) | 4 |
Profibus (1179B Compatible) | 3 |
PROFINET | 9 |
Analog 0 to 5 VDC (9 pin D connector) | A |
Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
Analog 0 to 5 VDC (15 pin D connector) | B |
Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
Analog 4 to 20 mA (15 pin D connector) | H |
Valve/Device Type |
|
Normally Closed | M |
Mass Flow Meter | 3 |
Seal Materials |
|
Buna Valve Plug | B |
Neoprene Valve Plug | N |
Viton Valve Plug | V |
EPDM Valve Plug | E |
No Valve (MFM Option) | 0 |
Reserved |
|
Reserved | 0 |
Firmware |
|
MKS will ship firmware revision current to date | 20 |
Digital I/O | DeviceNet™ | RS485 | Profibus® | EtherCAT® | PROFINET® |
---|---|---|---|---|---|
Input Power Required | +11 to +25 VDC per (<2 watts) | +15 to +24 VDC (<2 watts) | +15 to +24 VDC (<2 watts) | +24 VDC (<3 watts) | +24 VDC (<3 watts) |
Connector | 5 pin micro connector (power and comm.) | 9 pin Type D male (power and comm.) | 9 pin Type D male (power) 9 pin Type D female (comm.) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default) (programmable over network) |
No switch Set data rate via RS485 | No switch Set data rate via Profibus | No switch | No switch |
Comm. Rate(s) | 125 Kbps; 250 Kbps; 500 Kbps | 9.6 Kbps; 19.2 Kbps 38.4 Kbps | 9.6 Kbps to 12 Mbps | 100 Mbps | 100 Mbps |
MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 1 to 254 | Set address over RS485 Station Addresses 0,0 to 9,9 | 2 switches, 10 positions | 3 switches, 16 positions | N/A |
Network Size | Up to 64 nodes | Up to 32 nodes | Up to 99 nodes | Up to 4095 nodes | N/A |
Visual Indicators | LED Network (green/red) LED Module (green/red) |
LED Comm (yellow) LED Error (red) |
LED Comm (green/red) LED Error (green/red) |
LED Power (green) LED Run (green) LED Error (red) LED Comm (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
Compliance | CE | CE | CE | CE | CE |
The GM100A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM100A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM100As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
The GM100A utilizes the standard 3 inch footprint most often used by mass flow controllers in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N2 equivalent.
The GM100A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.