The elite™ Series of RF plasma generators provides state-of-the art technology in a compact air-cooled package. The elite is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. The elite design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
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ELITE-300HA-01 RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack |
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ELITE-300HD-01 RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack |
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ELITE-600FD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack |
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ELITE-600HA-01 RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack |
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ELITE-600HD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack |
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ELITE-600HP-01 RF Plasma Generator, 600 W, 13.56 MHz, Profibus Interface, Half Rack |
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ELITE-750FD-01 RF Plasma Generator, 750 W, 13.56 MHz, DeviceNet & Analog, Full Rack |
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Low Cost of Ownership
Ease of Installation
Exceptional Reliability
Increased Value