RF Power Generators

MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
Showing 17 products in 4 families
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keinos rf plasma generator
KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators
1 Products
nova rf plasma generator
NOVA® 2 MHz RF Plasma Generators
2 Products
elite rf plasma generators
elite™ 13.56 MHz RF Plasma Generators
11 Products
ghw rf plasma generator
GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW High-Reliability RF Plasma Generators
3 Products
 Dynamic Frequency Tuning (DFT)

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