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RF Power Generators

MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.

RF Power Generators

MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.

Showing 8 products in 2 families

Showing 8 products in 2 families

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keinos rf plasma generator

KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators

keinos rf plasma generator

KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators

elite rf plasma generators

elite™ 13.56 MHz RF Plasma Generators

Show Top Products

	Compare	Description		Avail.	Price	Qty.
		ELITE-300HA-01 RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack		Contact Us			ELITE-300HA-01 RF Plasma Generator, 300 W, 13.56 MHz, 25-pin Analog Interface, Half Rack Contact Us
		ELITE-600FD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack		Contact Us			ELITE-600FD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Full Rack Contact Us
		ELITE-300HD-01 RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack		Contact Us			ELITE-300HD-01 RF Plasma Generator, 300 W, 13.56 MHz, DeviceNet & Analog, Half Rack Contact Us
		ELITE-600HD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack		Contact Us			ELITE-600HD-01 RF Plasma Generator, 600 W, 13.56 MHz, DeviceNet & Analog, Half Rack Contact Us
		ELITE-600HA-01 RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack		Contact Us			ELITE-600HA-01 RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack Contact Us

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elite rf plasma generators

elite™ 13.56 MHz RF Plasma Generators

Dynamic Frequency Tuning (DFT)

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