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keinos rf plasma generator
RF Plasma Generator, 5, 11, or 13 kW, 2MHz, KEINOS


  • Type
    RF Plasma Generator
  • Frequency
    1.985 MHz
  • Frequency Tuning Range
  • Power Output
    5kW, 11kW, 13kW
  • Accuracy
    ±5W up to 500W
    ±1% from 501W to max power
  • Load Impedance Range
  • Pulse Frequency
    Up to 50KHz
  • Pulse Rise Time
    <5 µsec
  • Pulse Fall Time
    <5 µsec
  • Minimum Pulse Width
    10 µsec
  • Pulse Energy Repeatability
  • Hot Swap or Pulse on the Fly
  • Pulse Between Two Set Points
  • Pulse Enabled
    Via internal or external TTL trigger, SMA
  • Pulse Mode
    Master or slave operation
  • Input AC Power
    200/208VAC ±10%, 3 Phase, 50/60 Hz
  • Rated Current
    25 amps max (5kW)
    55 amps max (13kW)
  • RF Connector
    SQS standard (QC output)
  • Interface
    Ethernet, RS232
  • Dimensions
    5 kW: 5.25 x 17.5 x 24.5 inches
    11 kW & 13 kW: 8.30 x 17.8 x 25.5 inches (H x W x D)
  • Compliance
    CE, SEMI S2, SEMI S7, SEMI S14, SEMI F47, CAN/CSA-C22.2 No. 61010-1


Internal Scope

View of Smith chart and corresponding time sequence

  • High speed data collection with large memory buffer
  • Real time statistics for field diagnosis
  • Integrated high speed scope application to observe internal variables
  • Customized presets for rapid customer setups and consistent data mining
  • Control via Ethernet

On/Off Pulsing Performance

  • Sharp rectangular pulses with zero watts off state
  • Used when fast rise times are needed

Multiple Level Pulsing Performance

  • Sharp rectangular pulses with non zero off state
  • Used for minimizing plasma impedance shifts

Pulse Shaping Performance

  • Controlled ramping or controlled rise and fall time
  • Used for reducing pulse overshoot and plasma instabilities

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