E27H 0.02-100 Torr Heated (45°C) Baratron® Capacitance Manometers with Etch Sensor
Overview
The E27H is the solution for etch process-induced drift. Based on the industry-standard Baratron® capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The E27H Baratron® manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability.
- Temperature controlled to 45°C for up to 0.12% of reading accuracy
- 0 to 10 VDC analog output proportional to absolute pressure
- Etch baffle sensor significantly reduces the ability of byproducts to reach the sensor
- Full Scale ranges low as 20 mTorr for precise low pressure measurement
- All Inconel® sensor-corrosion resistant wetted surfaces
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
$3,070
|
E27H.1TBD5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration | $3,070 |
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
$3,070
|
E27H.1TDD5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration | $3,070 |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration
$3,070
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E27H11TBC1B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration | $3,070 |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED
$3,213
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E27H11TDC2B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED | $3,213 |
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Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED
$3,649
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E27HU2TBE6B Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED | $3,649 |
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Configuration Options
The following options are available for E27H Baratron® Heated Absolute Capacitance Manometers
Ordering Code Example: E27H01TBC1B
| Configuration Option | Option Code |
|---|---|
| E27H Absolute Capacitance Manometer. | E27H |
Full Scale Range |
|
| 0.02 Torr | U2T |
| 0.05 Torr | U5T |
| 0.1 Torr | .1T |
| 0.25 Torr | RET |
| 1 Torr | 01T |
| 2 Torr | 02T |
| 10 Torr | 11T |
| 20 Torr | 21T |
| 100 Torr | 12T |
Fittings |
|
| 0.5 in. OD Tube | A |
| 8 VCR female | B |
| 1.33 in. OD CF | C |
| NW16 ISO-KF (range < 5000 Torr) | D |
| 8 VCO female | E |
| 2.75 in. OD CF | L |
| NW25 ISO-KF (range < 5000 Torr) | Q |
Accuracy |
|
| 0.12% of Reading | C |
| 0.15% of Reading | D |
| 0.25% of Reading | E |
Options |
|
| Standard Configuration, vertical calibration | 1 |
| Temperature/Heater Status, vertical calibration | 2 |
| Standard Configuration, horizontal calibration (ranges <1 Torr only) | 5 |
| Temperature/Heater Status, horizontal calibration (ranges <1 Torr only) | 6 |
Connector |
|
| 15 pin Type "D" with Thread Locks | B |
| 15 pin Type "D" with Slide Locks | P |
Specifications
-
TypeVacuum/pressure Transducer
-
Measurement TypeAbsolute
-
Sensor TemperatureControlled to 45°C
-
Full Scale Pressure Ranges0.02, 0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 Torr
-
Accuracy0.12% of Reading
0.15% for 0.25, 0.1, and 0.05 Torr
0.25% for 0.02 Torr -
Analog Output0-10 VDC into >10K Ω load
-
Analog Connector15-pin D-sub
-
Zero Temperature Coefficient0.002% of Full Scale/°C for 1-100 Torr ranges
0.005% Full Scale /°C for 0.25 and 0.1 Torr
0.015% Full Scale /°C for 0.05 Torr
0.03% Full Scale /°C for 0.02 Torr
-
Span Temperature Coefficient0.02% of Reading/°C
-
Operating Temperature Range15-40°C
-
Volume6.3 cc
-
Warm-up Timehours for 1 Torr and higher, 4 hours for <1 Torr
-
Overpressure Limit45 psia (310 kPa) or 120% Full Scale , whichever is greater
-
Exposed MaterialsInconel®
-
Power Requirements±15 VDC ±5% @ 0.25 Amps (maximum)
-
ComplianceCE
Features
Baratron® Capacitance Manometer Technology
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.
Percent of Reading Accuracy
Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.
Internally Heated to 45°C
These capacitance manometers are temperature controlled to 45°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.
The pressure sensor is located inside a 45°C constant temperature oven for improved pressure measurement accuracy.
Absolute Pressure Measurement
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.
All-Inconel® Wetted Surfaces
These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.
0 to 10 VDC Proportional Analog Output
These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.
Recommended for Etch Processes
MKS has implemented solutions within the manometer’s pressure sensing element to minimize the effects of process byproducts and process gases. For processes that generate large quantities of condensable byproducts, MKS recommends the etch baffle sensor that significantly reduces the ability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine friendly (FF) sensor offering the ultimate in short- and long-term stability in fluorine chemistry.
15-pin D-subminiature Connector
| Pin | Description |
|---|---|
| 2 | Signal Output |
| 5 | Power Common |
| 6 | -15 VDC |
| 7 | +15 VDC |
| 12 | Signal Common |
| 15 | Chassis Ground |
Resources
Literature
- E27H Heated (45°C) Baratron® Capacitance Manometer with Etch Sensor (1.5 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS E27H Manometer Manual (602.7 kB, PDF)
- 626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs (22.4 kB, PDF)
Drawings & CADs
- E27 Dimensional Drawing (126.9 kB, PDF)
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