Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
Model: E27H.1TBD5B
Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
Model: E27H.1TBD5B
Overview
Overview
The E27H.1TBD5B e-Baratron® Ethernet-Enabled, 45°C Heated Absolute Capacitance Manometer, with an Etch Sensor features 0.1 Torr full scale pressure measurement with 0.15% accuracy, horizontal calibration, and a Swagelok® 8 female VCR® fitting. It features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. Updated temperature control electronics to provide superior long-term stability and repeatability. Based on established Baratron° capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 127, 627, and E27 Baratron® capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
Technical Specs
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TypeVacuum/pressure Transducer
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Measurement TypeAbsolute
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Sensor Temperature45°C
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Full Scale Range0.1 Torr
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Accuracy0.15% of Reading
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Resolution0.001% of Full Scale
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Fitting Type8 VCR female
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Analog Output0-10 VDC
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Analog Connector15-pin D-sub with Thread Locks
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CalibrationHorizontal
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Zero Temperature Coefficient0.005% of Full Scale/°C
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Span Temperature Coefficient0.02% of Reading/°C
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Operating Temperature Range15-40°C
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Volume6.3 cc
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Warm-up Time4 hours
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Power Requirements±15 VDC ±5% @ 0.25 Amps (max.)
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IndicatorsNo
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ComplianceCE
Resources & Downloads
Drawings & CADs
- E27 Dimensional Drawing (126.9 kB, PDF)
Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
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