631F 1-1000 Torr Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer
Overview
The 631F 1-1000 Torr, Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer, operating at very high internal temperatures, minimizes the deposition of process byproducts within the sensor by nearly eliminating output drift caused by contamination. Its available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD).
- 150°C or 200°C operating temperatures reduce contamination
- 0 to 10 VDC analog output proportional to absolute pressure
- Two optional pressure trip relays for controlling external equipment
- Inconel® sensor resists corrosion
- Performance is unaffected by pressure bursts
- Compact design & self-contained electronics save space
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$3,915
|
631F11T8FHBB Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $3,915 |
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Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,466
|
631F11T8FPBB Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $4,466 |
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,474
|
631F11TBFH Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $3,474 |
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Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$4,025
|
631F11TBFP Heated Capacitance Manometer, 200°C, 10 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $4,025 |
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays
$3,501
|
631F11TMFH Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays | $3,501 |
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Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays
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631F11TMFHAA Heated Capacitance Manometer, 150°C, 10 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays |
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Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$3,915
|
631F13T8FHBB Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $3,915 |
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|
Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays
$4,466
|
631F13T8FPBB Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, Below Set Point Relays | $4,466 |
|
|||
|
|
Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$3,474
|
631F13TBFH Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $3,474 |
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|
Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays
$4,025
|
631F13TBFP Heated Capacitance Manometer, 200°C, 1000 Torr, 0.5%, 8 VCR-F, DB15, No Relays | $4,025 |
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Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays
|
631F13TMFH Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, No Relays |
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Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays
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631F13TMFHAA Heated Capacitance Manometer, 150°C, 1000 Torr, 0.5%, 1.5 in. TriClover, DB15, Above Set Point Relays |
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Configuration Options
The following options are available for 631F Baratron® Heated Capacitance Manometers
Ordering Code Example: 631FXXUYZTRR Absolute Manometer
| Configuration Option | Option Code |
|---|---|
| 631F Absolute Capacitance Manometer | 631F |
Full Scale Range |
|
| 1 Torr | 01 |
| 2 Torr | 02 |
| 10 Torr | 11 |
| 30 Torr | 31 |
| 100 Torr | 12 |
| 1000 Torr | 13 |
Units of Measurement |
|
| Torr | T |
| mbar | M |
| Pascal | L |
Fittings |
|
| 0.5 in. OD tube | A |
| 8 VCR female, 1.58 in. port length | B |
| 8 VCR female, 2.1 in. port length | 8 |
| 8 VCR female, 2.5 in. port length | 9 |
| NW16 ISO-KF | D |
| 1.5 in. TriClover | M |
| 2.0 in. TriClover | N |
Accuracy |
|
| 0.50% Reading | F |
Temperature |
|
| 150°C | H |
| 200°C | P |
Integral Relays |
|
| No relays | None |
| Trip Point A Above Setpoint, Trip Point B Above Setpoint | AA |
| Trip Point A Above Setpoint, Trip Point B Below Setpoint | AB |
| Trip Point A Below Setpoint, Trip Point B Below Setpoint | BB |
| Trip Point A Below Setpoint, Trip Point B Above Setpoint | BA |
Specifications
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TypeVacuum/pressure Transducer
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Measurement TypeAbsolute
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Full Scale Pressure Ranges1, 2, 10, 30, 100, and 1000 Torr
-
Sensor TemperatureControlled to 150°C or 200°C
-
Accuracy0.50% of Reading
-
Analog Output0-10 VDC into >10 kΩ load
-
Analog Connector15-pin D-sub
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Trip Relays2 internally mounted process pressure trip relays independently adjustable from 0.5% to 100% of full scale range
-
Resolution0.01% of Full Scale
-
Zero Temperature Coefficient150°C Versions:0.004% FS/°C (0.008% Full Scale/°C for 1 Torr range)
200°C Versions: 0.008% FS/°C (0.016% Full Scale/°C for 1 Torr range)
-
Span Temperature Coefficient0.02% of Reading/°C
-
Response Time50 msec
-
Warm-up Time4 hours
-
Internal Volumev
-
Operating Temperature Range15-50°C
-
Overpressure Limit45 psia (310 kPa)
-
Materials Exposed to Process GasesInconel® or Incoloy® nickel alloys
-
Power Requirements±15 VDC (±5%) @ 1.0 amps max.
-
Ambient Airflow Requirements150°C Versions: 50 ft/min for ambient temperatures of 45-50°C
200°C Versions: 150 ft/min for ambient temperatures of 45-50°C -
ComplianceCE
Features
Baratron® Capacitance Manometer Technology
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.
Percent of Reading Accuracy
Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.
Internally Heated to 150°C or 200°C
These capacitance manometers are temperature controlled to 150°C or 200°C for improved accuracy. Unheated sensors are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer permitting use in the most demanding vacuum processes in semiconductor manufacturing, such as metal etching and nitride film chemical vapor deposition (CVD).
The pressure sensor is located inside a 150°C or 200°C constant temperature oven for improved pressure measurement accuracy.
Absolute Pressure Measurement
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.
Inconel® and Incoloy® Construction Wetted Surfaces
These pressure transducers feature Inconel® and Incoloy® nickel alloy construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including halogens, deionized water and steam, and ozone. The sensor is fully welded with no intermediate brazing or joining materials.
0 to 10 VDC Proportional Analog Output
These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.
Two Adjustable Process Trip Point Relays
An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available, allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted from 0.5% to 100% of full scale range by the user independently at atmospheric pressure, eliminating the need for vacuum pumps during setpoint adjustment. Relay capacity is 0.20 amps @ 30 VDC compling with UL1577 requirements.
15-pin Type "D" Pin-Outs with Relay Option
| Pin | Description |
|---|---|
| 1 | Trip Point A Relay N/O |
| 2 | Pressure Output |
| 3 | Trip Point A Relay Common |
| 4 | Trip Point A Relay N/C |
| 5 | Power Return |
| 6 | -15 VDC |
| 7 | +15 VDC |
| 8 | Trip Point B Relay N/O |
| 9 | Trip Point B Relay Common |
| 10 | Trip Point B Relay N/C |
| 11 | Heater Alarm Relay Common |
| 12 | Pressure Output Return |
| 13 | Heater Alarm Relay Open (when energized) |
| 15 | Heater Alarm Relay Closed (when energized) |
| 15 | Chassis Ground |
Resources
Literature
- 631F Heated (150°C or 200°C) Absolute Baratron® Capacitance Manometer (2 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS 631F High Temperature Transducer Manual (848.8 kB, PDF)
- 631 Capacitance Manometer Pin-outs (27.2 kB, PDF)
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