Plasma Source Tube Assembly, Sapphire, AX7610
Model: SA7610SAPP4
Plasma Source Tube Assembly, Sapphire, AX7610
Plasma Source Tube Assembly, Sapphire, AX7610
Model: SA7610SAPP4
Overview
Overview
The SA7610SAPP4 is a replaceable sapphire plasma tube for the AX7610S is a microwave plasma source, ideally suited for more severe CF4 CHF3 and NF3 chemistries.
Technical Specs
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TypeSapphire Tube Assembly
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Plasma Tube MaterialSapphire
Ultra-High Velocity