PPCA High Performance Integrated Pressure Controllers
Model: PPCA
PPCA High Performance Integrated Pressure Controllers
Model: PPCA
Overview
Overview
The PPCA can be configured for 5 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. The control valve can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions. The PPCA is available with either digital (DeviceNet™ or EtherCAT®) I/O.
Technical Specs
- TypeAbsolute Pressure Controller
- Pressure Range100 kPa
- Fitting Type4 VCR male
- Valve PositionNormally Closed
- Valve OrificeNo. 7 (50000 sccm)
- Flow Rate50000 sccm
- Plug MaterialViton/NC
- Pressure Resolution0.1 Torr
- Pressure Control Accuracy± 1.0% of Reading (≥10% Full Scale, ± 0.2% of Full Scale (<10% Full Scale)
- Transducer Over Pressure Limit2x Full Scale for all ranges
- Maximum Differential Pressure45 psid
- Burst Pressure1500 psig
- Control ModeDownstream (outlet
- Pressure Measurement Accuracy±0.5% of Reading
- Zero Temperature Coefficient±0.02% of Full Scale /°C
- Span Temperature Coefficient±0.04% of Reading /°C
- Control Range>5 to 100% of Full Scale
- Typical Response Time<1.0 second (excluding system time constant)
- Operating Temperature10 - 50°C (50 - 122°F)
- Storage Temperature-20 - 80°C (-4 - 176°F)
- Storage Humidity0 - 95% relative humidity, non-condensing
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere), <0.1% of orifice Full Scale - Elastomer
- Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45, Inconel® 718, 825 Incoloy®, plus valve seat
- Surface Finish10 µinches, average Ra
- Connector-InterfaceEtherCAT
- Weight<3 lbs (1.36 kg)
- ComplianceCE
Technical Specs
- TypeAbsolute Pressure Controller
- Pressure Range100 kPa
- Fitting Type4 VCR male
- Valve PositionNormally Closed
- Valve OrificeNo. 7 (50000 sccm)
- Flow Rate50000 sccm
- Plug MaterialViton/NC
- Pressure Resolution0.1 Torr
- Pressure Control Accuracy± 1.0% of Reading (≥10% Full Scale, ± 0.2% of Full Scale (<10% Full Scale)
- Transducer Over Pressure Limit2x Full Scale for all ranges
- Maximum Differential Pressure45 psid
- Burst Pressure1500 psig
- Control ModeDownstream (outlet
- Pressure Measurement Accuracy±0.5% of Reading
- Zero Temperature Coefficient±0.02% of Full Scale /°C
- Span Temperature Coefficient±0.04% of Reading /°C
- Control Range>5 to 100% of Full Scale
- Typical Response Time<1.0 second (excluding system time constant)
- Operating Temperature10 - 50°C (50 - 122°F)
- Storage Temperature-20 - 80°C (-4 - 176°F)
- Storage Humidity0 - 95% relative humidity, non-condensing
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere), <0.1% of orifice Full Scale - Elastomer
- Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45, Inconel® 718, 825 Incoloy®, plus valve seat
- Surface Finish10 µinches, average Ra
- Connector-InterfaceEtherCAT
- Weight<3 lbs (1.36 kg)
- ComplianceCE
Resources & Downloads
Drawings & CADs
PPCA Dimensional Drawing(201.9 kB, PDF)