HCV High-cycle Bellows Vacuum Isolation Valves
Model: HCV
HCV High-cycle Bellows Vacuum Isolation Valves
Model: HCV

Overview
Overview
The Series HCV High Cycle Valve is a small vacuum valve expressly designed for long life in demanding applications. It has a small profile, is light, low in cost and is easy to maintain. The High Cycle Valve can be purchased with a high conductance stainless body or without (internal configuration) if being designed to fit directly into the product, for example, a load lock chamber. Manufactured using superior techniques and high quality materials, the High Cycle Valve is extremely durable and dependable. Lifetime can be extended to 10,000,000 cycles, greatly increasing system uptime and lowering maintenance cost. A new formed stainless steel bellows prevents outgassing, virtual leaks and particle entrapment, extending the cycle life of the valve. The bellows stroke length is optimized to ensure a longer cycle life while maintaining a high conductance. Another standard feature, a TIG fusion welded vacuum grade body made of high-grade, corrosion resistant, 304 stainless steel, creates fewer entrapment areas, resulting in less contamination buildup. In the event of power loss, a high-grade reliable heavy-duty spring will automatically close the valve. The High Cycle Valve is available in angle, inline and internal only configurations. Port sizes include NW 25, NW 40 and NW 50 using maximum internal diameters for greater conductance. Internal configuration can be used to integrate directly into the chamber reducing the footprint of new tools. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or in Kalrez® or Chemraz® for higher temperature conditions and increased chemical resistance.
Technical Specs
- TypeHigh Cycle Valve
- Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
- Body ConfigurationInline
- Port SizeNW50
- Flange SizeNW50
- Flange TypeISO-KF
- Helium Leak Rate1.0 x 10-9 std cc/sec
- ActuationPneumatic, Normally Closed with Limit Switch
- SealChemraz
- Control Port Options0.125 in. NPT Port
- Cylinder Volume1.2 - 6.4 in3 (20 - 105 cm3) depending on port size
- Cylinder Air Pressure90 psig ±30 psig
- Limit Switch Rating5 Amps, 250 VAC
- Single Pole, Single Throw5 Amps, 30 VDC
- Blow-By Pressure80 - 45 psi depending on port size
- Actuation TimeOpening: 40 - 60 msec, Closing: 90 - 220 msec (at 100 psi msec) depending on port size
- Typical Life10,000,000 cycles in clean non-corrosive environments
- Weight1.6 - 6.4 lb. (0.7 - 2.9 kg) depending on configuration
Technical Specs
- TypeHigh Cycle Valve
- Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
- Body ConfigurationInline
- Port SizeNW50
- Flange SizeNW50
- Flange TypeISO-KF
- Helium Leak Rate1.0 x 10-9 std cc/sec
- ActuationPneumatic, Normally Closed with Limit Switch
- SealChemraz
- Control Port Options0.125 in. NPT Port
- Cylinder Volume1.2 - 6.4 in3 (20 - 105 cm3) depending on port size
- Cylinder Air Pressure90 psig ±30 psig
- Limit Switch Rating5 Amps, 250 VAC
- Single Pole, Single Throw5 Amps, 30 VDC
- Blow-By Pressure80 - 45 psi depending on port size
- Actuation TimeOpening: 40 - 60 msec, Closing: 90 - 220 msec (at 100 psi msec) depending on port size
- Typical Life10,000,000 cycles in clean non-corrosive environments
- Weight1.6 - 6.4 lb. (0.7 - 2.9 kg) depending on configuration
