HCV High-cycle Bellows Vacuum Isolation Valves
Overview
HCV High-cycle Bellows Vacuum Isolation Valves are small vacuum valves expressly designed for long life in demanding applications. The HCV isolation valve has a small profile, is light, low in cost and is easy to maintain. The HCV valve can be purchased with a high conductance stainless body or without (internal configuration) if being designed to fit directly into the product.
- NW25 - NW50
- HV load lock pumping or high cycle applications
- 10,000,000 cycle rating (clean environments)
- Compact low profile, compatible with small footprint designs
- Internal configuration reduces size and can be integrated into load lock chambers
- Spring to close, air to open pneumatic valve, for safety
Products
Configuration Options
The following options are available for High Cycle Valves (HCV)
Ordering Code Example: HCV50-AK-CLV-120
| Configuration Option | Option Code |
|---|---|
| HCV Vacuum Isolation Valve | HCV |
| Flange Size | |
| NW25 | 25 |
| NW40 | 40 |
| NW50 | 50 |
| Body Configuration | |
| Angle | A |
| Inline | I |
| Flange Type | |
| ISO-KF | K |
| Actuator Type | |
| Normally Closed Pneumatic (No Limit Switch) | CN |
| Normally Closed Pneumatic (Limit Switch) | CL |
| Seal Type | |
| Viton® | V |
| Kalrez® | K |
| Chemraz® | Z |
| Solenoid | |
| 12 VDC | 12D |
| 24 VDC | 24D |
| 24 VAC 50/60 Hz | 24A |
| 120 VAC 50/60 Hz | 120 |
| 240 VAC 50/60 Hz | 240 |
| 1/8 inch NPT | None |
Specifications
-
TypeHigh Cycle Valve
-
Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
-
Port SizeNW25, NW40, NW50
-
Helium Leak Rate1.0 x 10-9 std cc/sec
-
Cylinder Volume1.2 - 160 msec, depending on configuration
-
Cylinder Air Pressure90 psig ±30 psig
-
Limit Switch Rating5A - 250 VAC
-
Single Pole, Single Throw5A - 30 VDC
-
Blow-By Pressure80 - 45 psi, depending on configuration
-
Operating Temperature80°C (max)
-
Typical Life10,000,000 cycles in clean non-corrosive environments
-
Weight1.6 - 6.4 pounds, depending on configuration
Features
Extremely Durable and dependable
Manufactured using superior techniques and high quality materials, the High Cycle Valve is extremely durable and dependable. Lifetime can be extended to 10,000,000 cycles, greatly increasing system uptime and lowering maintenance cost. A new formed stainless steel bellows prevents outgassing, virtual leaks and particle entrapment, extending the cycle life of the valve. The bellows stroke length is optimized to ensure a longer cycle life while maintaining a high conductance. Another standard feature, a TIG fusion welded vacuum grade body made of high-grade, corrosion resistant, 304 stainless steel, creates fewer entrapment areas, resulting in less contamination buildup. In the event of power loss, a high-grade reliable heavy-duty spring will automatically close the valve.
High Cycle Valve Options
The High Cycle Valve is available in angle, inline and internal only configurations. Port sizes include NW 25, NW 40 and NW 50 using maximum internal diameters for greater conductance. Internal configuration can be used to integrate directly into the chamber reducing the footprint of new tools. For leaktight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or in Kalrez® or Chemraz® for higher temperature conditions and increased chemical resistance. Options for the High Cycle Valve include an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote “open or closed” position indication.
Applications
The High Cycle Valve is designed to be used in applications where the cycle life of the valve is critical. It is ideally suited for Load Lock chambers where over 1,000,000 cycles can be achieved yearly giving it a life span greater than 5 years.
Resources
Literature
- High Cycle Valves (HCV) (851.7 kB, PDF)
Manuals
- High Cycle Valve Manual (486.6 kB, PDF)
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