Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
Model: GE50A013502RMV020
Mass Flow Controller, 500 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
Model: GE50A013502RMV020
Overview
Overview
The G-Series GE50A013502RMV020 is a digitally-controlled mass flow controller utilizing the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It is calibrated to N2 (or an equivalent gas), has a Full Scale Flow Range of 500 sccm and a control range of 10 to 500 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range500 sccm
- Control Range10 - 500 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type4 VCR male
- Seal MaterialViton
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 to 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed ValveUp to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Surface Finish16µ inch average Ra
- Weight3 lbs (1.4 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range500 sccm
- Control Range10 - 500 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type4 VCR male
- Seal MaterialViton
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 to 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed ValveUp to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Surface Finish16µ inch average Ra
- Weight3 lbs (1.4 kg)
- ComplianceCE
Resources & Downloads
Drawings & CADs
Literature
GE50A Elastomer-sealed, Digital Mass Flow Controller(449.5 kB, PDF)