Mass Flow Controller, 200 sccm, 4 VCR male, 0-5 VDC, DB15, Viton Seal

Model: GE50A013202RBV020

$2,037

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The GE50A013202RBV020 elastomer-sealed Mass Flow Controller features 200 sccm, with 4 VCR male fitting, a DB15 connector, with a Viton seal.

Type
Mass Flow Controller
Full Scale Flow Range
200 sccm
Calibration Gas
Nitrogen
Fitting Type
Swagelok 4 VCR male
Seal Material
Viton
Analog Connector
Analog 0-5 VDC (15 pin D connector)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10-5000 sccm: 10-40 psid, 10000-20000 sccm: 15-40 psid, 30000-50000 sccm: 25-40 psid
Burst Pressure
1500 psig
Typical Accuracy
±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C

Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10-50°C
Storage Humidity
0-95% relative humidity, non-condensing
External Leak Integrity
<1 x 10^-09 (scc/sec He)
Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
16µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE

Type
Mass Flow Controller
Full Scale Flow Range
200 sccm
Calibration Gas
Nitrogen
Fitting Type
Swagelok 4 VCR male
Seal Material
Viton
Analog Connector
Analog 0-5 VDC (15 pin D connector)
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10-5000 sccm: 10-40 psid, 10000-20000 sccm: 15-40 psid, 30000-50000 sccm: 25-40 psid
Burst Pressure
1500 psig
Typical Accuracy
±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C

Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10-50°C
Storage Humidity
0-95% relative humidity, non-condensing
External Leak Integrity
<1 x 10^-09 (scc/sec He)
Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish
16µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE

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