E29H 0.02-1000 Torr Heated (45 or 100°C) Baratron® Capacitance Manometers with Etch Sensor
Model: E29H
E29H 0.02-1000 Torr Heated (45 or 100°C) Baratron® Capacitance Manometers with Etch Sensor
Model: E29H

Overview
Overview
The E29H Baratron® Etch Manometer is temperature controlled to either 45°C or 100°C, accurate to ±0.12% of Reading, and includes efficient temperature control electronics to provide superior long-term stability and repeatability. It has an optional external zero input, which accepts a voltage equal to and opposite to the zero offset, to provide a zero output at zero pressure. The optional “At Temperature” LED/switch indicates that the sensor is at the controlled temperature (either 45°C or 100°C). The E29H Etch Manometer is available in Full Scale ranges down to 50 mTorr for 100°C and to 20 mTorr for 45°C units, to better accommodate today’s lower process pressures. Based on the well-established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for corrosion resistance. The modern stainless steel enclosure provides a cleanroom compatible product. The E29H is fully compatible with earlier MKS’ Types 629A, 629B, 629D, E29B, E29D and E29F Baratron capacitance manometers, as well as many competitive products.
Technical Specs
- TypePressure Transducer
- Sensor TypeEtch
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range20 Torr
- Accuracy0.50% of Reading
- Resolution0.001% of Full Scale (0.002% of Full Scale for 0.02 and 00.5 Torr)
- Fitting Type1.33 in. OD CF
- Analog Output0 - 10 VDC
- Analog Connector9-pin D-sub with Thread Locks
- Zero Temperature Coefficient45°C: 0.002% of Full Scale/°C for 1-1000 Torr, 0.005% of Full Scale/°C for 0.1 Torr, 0.015% of Full Scale/°C for 00.5 Torr, 0.03% of Full Scale/°C for 0.02 Torr, 100°C: 0.002% of Full Scale/°C for 1-1000 Torr, 0.01% of Full Scale/°C for 0.1 Torr, 0.02% of Full Scale/°C for 00.5 Torr
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15 - 40°C for 45°C version, 15 - 50°C for 100°C version
- Volume6.3 cc
- Warm-up Time2 hours for 1-1000 Torr Full Scale, 4 hours for 0.1 Torr Full Scale and lower
- Overpressure Limit45 psia (310 kPa)
- Exposed MaterialsInconel®
- Power Requirements±15 VDC ±5% @ 0.25 Amps for 45°C, 0.5 Amps for 100°C
- OptionsHeater Status Indication/Horizontal Calibration
- ComplianceCE
Technical Specs
- TypePressure Transducer
- Sensor TypeEtch
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range20 Torr
- Accuracy0.50% of Reading
- Resolution0.001% of Full Scale (0.002% of Full Scale for 0.02 and 00.5 Torr)
- Fitting Type1.33 in. OD CF
- Analog Output0 - 10 VDC
- Analog Connector9-pin D-sub with Thread Locks
- Zero Temperature Coefficient45°C: 0.002% of Full Scale/°C for 1-1000 Torr, 0.005% of Full Scale/°C for 0.1 Torr, 0.015% of Full Scale/°C for 00.5 Torr, 0.03% of Full Scale/°C for 0.02 Torr, 100°C: 0.002% of Full Scale/°C for 1-1000 Torr, 0.01% of Full Scale/°C for 0.1 Torr, 0.02% of Full Scale/°C for 00.5 Torr
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15 - 40°C for 45°C version, 15 - 50°C for 100°C version
- Volume6.3 cc
- Warm-up Time2 hours for 1-1000 Torr Full Scale, 4 hours for 0.1 Torr Full Scale and lower
- Overpressure Limit45 psia (310 kPa)
- Exposed MaterialsInconel®
- Power Requirements±15 VDC ±5% @ 0.25 Amps for 45°C, 0.5 Amps for 100°C
- OptionsHeater Status Indication/Horizontal Calibration
- ComplianceCE
Resources & Downloads
Drawings & CADs
E29 Dimensional Drawing(126.9 kB, PDF)
