DELTA IV 4-zone Flow Ratio Controller
Model: DLT4B-DeviceNet
DELTA IV 4-zone Flow Ratio Controller
Model: DLT4B-DeviceNet
Overview
Overview
The DELTA™ IV DeviceNet™ 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. DELTA™ mass flow ratio controllers divide and control mixed process gas flows to multiple chambers or zones at user-specified proportions, optimizing process uniformity and repeatability. DELTA™ IV DeviceNet™ mass flow ratio controllers are used in a variety of flow splitting applications such as etch, strip, and CVD.
Technical Specs
- TypeFlow Ratio Controller
- Full Scale Flow Range500, 1000, 2000, and 10,000 sccm per channel (N2 equivalent)
- Typical Accuracy1 ± 2% set point (for percent set points above 10%)
- Repeatability±0.3% of set point
- Resolution0.02% of channel Full Scale
- Maximum Operating Outlet Pressure200 Torr at maximum flow rate through all channels
- Maximum Allowable Outlet Pressure Differential50 Torr with the same percentage flow through all channels (highest to lowest pressure channel)
- Normal Operating Pressure Differential<150 Torr, Except, <450 Torr for 10K/10K
- Typical Settling Time<3 seconds (typical dependent on downstream conductance matching)
- Maximum Inlet Pressure150 psig (non-operational)
- Zero Temperature Coefficient0.05% Full Scale/° C (500 ppm)
- Span Temperature Coefficient<0.08% of Reading/° C (800 ppm)
- Warm-up Time60 minutes (minimum with device powered and at equilibrium with ambient)
- Operating Temperature10 - 40°C
- Storage Temperature-20 - 65°C
- Storage Humidity0 - 95% relative humidity, non-condensing
- Temperature Display0 - 100°C
- Temperature Accuracy+2°C
- Temperature Resolution0.1°C
- Fitting Type4 VCR male
- External Leak Integrity<1x10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<2% of channel Full Scale at 500 Torr differential to <10 Torr
- Wetted Materials316 Stainless Steel VAR (equivalent to 316 Stainless Steel SCQ for semiconductor quality), 316 Stainless Steel nickel, Inconel®, KM-45, PTFE
- Surface Finish5 microinch average Ra
- Connector5-pin microconnector
- Power Requirements11 - 25 VDC
- Set Point Command SignalDigital
- Channels4
- Percentage Flow Control Range0, 5 - 100% Full Scale
- Percentage Range0, 5 - 100% of total flow within flow channel control range
- Temperature Readout Units°C
- CommunicationDeviceNet
- ComplianceCE
Technical Specs
- TypeFlow Ratio Controller
- Full Scale Flow Range500, 1000, 2000, and 10,000 sccm per channel (N2 equivalent)
- Typical Accuracy1 ± 2% set point (for percent set points above 10%)
- Repeatability±0.3% of set point
- Resolution0.02% of channel Full Scale
- Maximum Operating Outlet Pressure200 Torr at maximum flow rate through all channels
- Maximum Allowable Outlet Pressure Differential50 Torr with the same percentage flow through all channels (highest to lowest pressure channel)
- Normal Operating Pressure Differential<150 Torr, Except, <450 Torr for 10K/10K
- Typical Settling Time<3 seconds (typical dependent on downstream conductance matching)
- Maximum Inlet Pressure150 psig (non-operational)
- Zero Temperature Coefficient0.05% Full Scale/° C (500 ppm)
- Span Temperature Coefficient<0.08% of Reading/° C (800 ppm)
- Warm-up Time60 minutes (minimum with device powered and at equilibrium with ambient)
- Operating Temperature10 - 40°C
- Storage Temperature-20 - 65°C
- Storage Humidity0 - 95% relative humidity, non-condensing
- Temperature Display0 - 100°C
- Temperature Accuracy+2°C
- Temperature Resolution0.1°C
- Fitting Type4 VCR male
- External Leak Integrity<1x10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<2% of channel Full Scale at 500 Torr differential to <10 Torr
- Wetted Materials316 Stainless Steel VAR (equivalent to 316 Stainless Steel SCQ for semiconductor quality), 316 Stainless Steel nickel, Inconel®, KM-45, PTFE
- Surface Finish5 microinch average Ra
- Connector5-pin microconnector
- Power Requirements11 - 25 VDC
- Set Point Command SignalDigital
- Channels4
- Percentage Flow Control Range0, 5 - 100% Full Scale
- Percentage Range0, 5 - 100% of total flow within flow channel control range
- Temperature Readout Units°C
- CommunicationDeviceNet
- ComplianceCE
Resources & Downloads
Literature
Drawings & CADs
DELTA™ IV DeviceNet™ Dimensional Drawing (110 kB, PDF)