DELTA II 2-zone Flow Ratio Controller
Model: DLT2B-EtherCAT
DELTA II 2-zone Flow Ratio Controller
Model: DLT2B-EtherCAT

Overview
Overview
The EtherCAT® DELTA™ II Flow Ratio Controller divides and controls mixed process gas flows to either multiple chambers or zones within a process chamber at ratios specified by the user maximizing process uniformity and repeatability.
Resources & Downloads
Literature
DELTA™ II EtherCAT® Flow Ratio Controller(259.8 kB, PDF)
Drawings & CADs
DELTA™ II EtherCAT FRC Dimensional Drawing(2.4 MB, PDF)