Technical Specs

  • Type
    Capacitance Manometer
  • Sensor Type
    Deposition/etch/fluorine friendly sensor
  • Sensor Temperature
    100°C
  • Full Scale Range
    20 Torr
  • Accuracy
    Standard
  • Fitting Type
    NW16 ISO-KF
  • Electrical Connector
    15-pin D-subminiature male connector with slide lock
  • Trip Points
    Trip A below 50%, Trip B above 50% of Full Scale Range
  • Units
    mbar Absolute

Technical Specs

  • Type
    Capacitance Manometer
  • Sensor Type
    Deposition/etch/fluorine friendly sensor
  • Sensor Temperature
    100°C
  • Full Scale Range
    20 Torr
  • Accuracy
    Standard
  • Fitting Type
    NW16 ISO-KF
  • Electrical Connector
    15-pin D-subminiature male connector with slide lock
  • Trip Points
    Trip A below 50%, Trip B above 50% of Full Scale Range
  • Units
    mbar Absolute

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