The DA02A13TCES21C00 Baratron® 100° C Temperature-controlled, Digital, EtherCAT® Capacitance Manometer features 1000 Torr full scale pressure measurement and has a Swagelok® 8 female VCR® fitting. Based on the proven 627C and 628C Ethernet-equipped e-Baratron products, the EtherCAT Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems. It uses the exact same Inconel®-based capacitance sensor as current MKS Baratron manometer products, offering the same long lifetime, low maintenance, and high corrosion resistance as current analog Baratron capacitance manometers.
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DA02A13TCES21C00 - Drawings
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DA02A13TCES21C00
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