Sorry, this product is no longer offered for sale. The recommended replacement product is DA02B13TCES21C00.
DA02A 0.1-1000 Torr Heated & Unheated Baratron® EtherCAT® Capacitance Manometers
Model: DA02A13TCES21C00
DA02A 0.1-1000 Torr Heated & Unheated Baratron® EtherCAT® Capacitance Manometers
Model: DA02A13TCES21C00
Overview
Overview
The DA02A13TCES21C00 Baratron® 100° C Temperature-controlled, Digital, EtherCAT® Capacitance Manometer features 1000 Torr full scale pressure measurement and has a Swagelok® 8 female VCR® fitting. Based on the proven 627C and 628C Ethernet-equipped e-Baratron products, the EtherCAT Baratron manometer meets the current SEMI® EtherCAT Common Device Profile and is designed for use in advanced processing systems. It uses the exact same Inconel®-based capacitance sensor as current MKS Baratron manometer products, offering the same long lifetime, low maintenance, and high corrosion resistance as current analog Baratron capacitance manometers.
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range1000 Torr
- Accuracy0.10% of Reading
- Fitting Type8 VCR female
- Communication ProtocolEtherCAT
- Analog Output0 - 10 VDC
- Analog Connector15-pin D-sub
- Digital ConnectorTwo RJ45 EtherCAT jacks
- CalibrationStandard
- Zero Temperature Coefficient0.002% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15° to 40°C
- Volume6.3 cc
- Warm-up Time2 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel® and Incoloy® nickel alloys
- Trip PointsNone
- ComplianceCE
Technical Specs
- TypeDigital Pressure Transducer
- Sensor TypeCapacitance Manometer
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range1000 Torr
- Accuracy0.10% of Reading
- Fitting Type8 VCR female
- Communication ProtocolEtherCAT
- Analog Output0 - 10 VDC
- Analog Connector15-pin D-sub
- Digital ConnectorTwo RJ45 EtherCAT jacks
- CalibrationStandard
- Zero Temperature Coefficient0.002% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15° to 40°C
- Volume6.3 cc
- Warm-up Time2 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel® and Incoloy® nickel alloys
- Trip PointsNone
- ComplianceCE
Resources & Downloads
Drawings & CADs
DA02 Baratron® Capacitance Manometer Dimensional Drawings(131.9 kB, PDF)