971B UniMag™ Cold Cathode Vacuum Pressure Transducers
Overview
The 971B UniMag™ vacuum transducer offers a measurement range from 1x10-8 Torr to 5x10-3 Torr and is based on cold cathode inverted magnetron sensor technology. The 971B is a cost effective solution for base pressure measurement and control. In addition to its small size, broad range and lower cost, the 971 UniMag™ Cold Cathode Inverted Magnetron Transducer Vacuum Gauge can be operated via digital communication or as an autonomous analog unit. Series 970B transducers have standard 15 pin HD Sub-D connectors.
- Absolute measurement range from 1x10-8 to 0.005 Torr
- The cold cathode anode module design is user serviceable to decrease downtime
- Ease of operation via analog output, RS232, or RS485
- Optional integrated touch-screen display available for local pressure indication
- Three user configurable relays for process control
- Small footprint design provides a compact transducer solution
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
971B-21024 Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232 | $1,000 |
|
||||
|
971B-21030 Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS232, 3 Relays | $814 |
|
||||
|
|
Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays
$1,047
|
971B-21034 Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays | $1,047 |
|
|||
|
|
971B-22020 Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485 | $814 |
|
||||
|
|
971B-22024 Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS485 | $1,000 |
|
||||
|
|
971B-22030 Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485, 3 Relays | $863 |
|
||||
|
|
Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS485, 3 Relays
|
971B-22034 Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS485, 3 Relays |
|
||||
|
|
971B-71020 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232 | $905 |
|
||||
|
|
971B-71024 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS232 | $1,089 |
|
||||
|
|
971B-71030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS232, 3 Relays | $947 |
|
||||
|
|
Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS232, 3 Relays
$1,137
|
971B-71034 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS232, 3 Relays | $1,137 |
|
|||
|
|
971B-72020 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS485 | $903 |
|
||||
|
|
971B-72024 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS485 | $1,089 |
|
||||
|
|
971B-72030 Vacuum Pressure Transducer, Cold Cathode, 2.75 in. CF, RS485, 3 Relays | $953 |
|
||||
|
|
Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS485, 3 Relays
$1,155
|
971B-72034 Vacuum Pressure Transducer, Cold Cathode, Display, 2.75 in. CF, RS485, 3 Relays | $1,155 |
|
|||
|
|
971B-91020 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS232 | $832 |
|
||||
|
|
971B-91024 Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS232 | $1,017 |
|
||||
|
|
971B-91030 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS232, 3 Relays | $879 |
|
||||
|
|
Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS232, 3 Relays
$1,065
|
971B-91034 Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS232, 3 Relays | $1,065 |
|
|||
|
|
971B-92020 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS485 | $831 |
|
||||
|
|
971B-92024 Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS485 | $1,017 |
|
||||
|
|
971B-92030 Vacuum Pressure Transducer, Cold Cathode, NW40 ISO-KF, RS485, 3 Relays | $880 |
|
||||
|
|
Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS485, 3 Relays
|
971B-92034 Vacuum Pressure Transducer, Cold Cathode, Display, NW40 ISO-KF, RS485, 3 Relays |
|
Configuration Options
The following options are available for 971B UniMag™ Vacuum Pressure Transducers
Ordering Code Example: 971B-21034
|
Configuration Option |
Option Code |
|---|---|
| 971B UniMag Vacuum Pressure Transducer | 971B |
Fitting |
|
| NW25 ISO-KF | 2 |
| NW40 ISO-KF | 9 |
| 2.75 in. OD CF | 7 |
Interface |
|
| RS232 | 1 |
| RS485 | 2 |
Analog Output |
|
| 0.5 VDC per decade | 0 |
Relays |
|
| No relays | 2 |
| 3 relays | 3 |
Enclosure |
|
| Standard | 0 |
| IP54 | 2 |
| Standard with display | 4 |
Specifications
-
Absolute Measurement Range1 x 10-8 Torr to 5 x 10-3 Torr
-
Digital CommunicationRS485 or RS232
-
TypeVacuum Transducer
-
SensorCold Cathode
-
DisplayTouch-screen (optional)
-
Seal MaterialViton
-
EnclosureStandard or IP56
-
Electrical Connector15-pin, High Density, D-sub male
-
Relays0 or 3
-
Installation OrientationAny
-
Set Point Range1 x 10-8 Torr to 5 x 10-3 Torr
-
Calibration GasNitrogen
-
Operating Temperature0-40°C (32-104°F)
-
Maximum Bakeout Temperature85°C (185°F), non-operating
-
Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
-
Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
-
Analog Output0.5 VDC per decade
-
Relay Contact Rating1 A @ 30VAC/DC, resistive
-
Power Requirements9-30 VDC, 2 W
-
Accuracy5 x 10-8 Torr to 10-3 ± 30% of reading
-
Repeatability5 x 10-8 Torr to 10-3 ± 30% of reading
-
Overpressure Limit1500 Torr
-
Internal Volume21 cc
-
Exposed Materials304 and 403 stainless steel, Viton®, Cu-Ni and Ag-Cu alloy, ceramic, titanium
-
Electronic Casing and Flange304 stainless steel
-
Weight12.7 oz (360 g)
-
ComplianceCE
Features
Digital Communications
Series 970B vacuum transducers feature RS232, RS485, and EtherCAT (972B only) digital communications interface for setup of transducer parameters and to provide real time pressure measurement. The digital interface can be used to control pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, and gas type.
0.5 VDC per Decade Analog Output
All Series 970B transducers have an analog pressure output of 0.5 VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. It can emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
Process Control Relays
The Series 970B has up to three mechanical SPST relays which can be used for process control, examples are interlocking valves or pumps. Relay contacts are rated at 1 amp for 30 VAC or VDC, resistive loads.
Applications
Sensor and transducer measurement ranges. From top to bottom: 971B, 972B, and 974B
The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization.
Applications include:
- Analytical equipment (mass spectrometer control)
- Scanning electron microscopes
- Coating systems
- Semiconductor loadlock pressure control
- General vacuum base pressure measurement
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 971, 972, 974 Vacuum Transducer Pin-outs (60.8 kB, PDF)
- 971B UniMag™ Transducer Manual (100017131, Rev. J) (1.6 MB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335) (925.8 kB, PDF)
- 971B, 972B, 974B Anode/Cathode Replacement Procedure (106.8 kB, PDF)
Literature
- 970 Cold Cathode Transducers (250.9 kB, PDF)
- Vacuum Measurement Product Guide (711.5 kB, PDF)
Drawings & CADs
- 971 UniMag™ Cold Cathode Transducer Dimensional Drawing (242.3 kB, PDF)
Other
- 970B/971B RoHS Certificate of Compliance (523.3 kB, PDF)
Ultra-High Velocity