The 4615-0103 Entry Port Heater is designed for metal etch traps with a NW40 size entry port. The heater is 3 inches in length and operates at 120 VAC. Metal etch process traps operate most efficiently when they are installed in the foreline between the turbo pump and the dry pump with a line pressure above 100 mTorr. The Metal Etch Trap operates in conjunction with a heated foreline operating at 105°C which prevents condensation of the exhaust byproducts. The heating of this line must be very uniform, with no cold spots.
Additional CAD file downloads are not available for this product.
4615-0103 - Drawings
Additional drawings are not available for this product.
4615-0103
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Entry Port Heater, Metal Etch Trap, NW 40, 3 inch length, 120 VAC