Foreline Process Traps

Trap by products of vacuum processes to prevent damage and clogging from downstream effluents

MKS Instruments patented line of process traps are highly-efficient and compact traps. Each trap is designed for specific processes in thin film manufacturing. Byproducts are trapped inside, away from the process, pumps, gauging or anything else that can be damaged or clogged by hardened byproducts. When used in conjunction with an Effluent Management Subsystem, the results can include increased uptime, longer pump life, safer cleaning and byproduct disposal, and higher yields.