Mass Flow Meter, 200 sccm, 0.25 in. Tube, DB15, Metal Seal
Model: 179C01322CS3BM
Mass Flow Meter, 200 sccm, 0.25 in. Tube, DB15, Metal Seal
Mass Flow Meter, 200 sccm, 0.25 in. Tube, DB15, Metal Seal
Model: 179C01322CS3BM
Overview
Overview
The 179C01322CS3BM is a general purpose mass flow meter with a metal seal, rated for 200 sccm Full Scale (N2), with 0.25 inch tubes and a 15-Pin type D connector. It is designed to measure the flow of gases in a wide variety of applications. It provides fast, repeatable flow metering and is a direct form-fit-function replacement for the most common MFMs on the market today. The standard 3-inch footprint enables the 179C to drop directly into the same space without modifying existing gas lines.
Technical Specs
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TypeMass Flow Meter
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Calibration GasN2 (or equivalent)
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Full Scale Flow Range200 sccm
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Fitting Type0.25 in. tube
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Analog I/O Connector15-pin D-sub
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Seal MaterialMetal
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Maximum Inlet Pressure500 psig
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Normal Operating Pressure Differential10 Torr
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Typical Accuracy±1.0% of Full Scale
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Repeatability±0.2% of Full Scale
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Resolution0.1% of Full Scale
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Zero Temperature Coefficient<0.05% of Full Scale/°C
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Span Temperature Coefficient<0.08% of Reading/°C
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Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
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Operating Temperature0 - 50°C
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Wetted Materials316L stainless steel
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External Leak Integrity<1 x 10-9
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ComplianceCE
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Typical Current Required at Steady State±15 VDC (±5%) @ 150 mA
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Digital I/O Level of Filtering±15 VDC (±5%) @ 50 mA
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Valve State<0.02% of Reading/psi
Resources & Downloads
Literature
- 179C All-Metal Mass Flo® Mass Flow Meter, 10 sccm - 20 slm (231.2 kB, PDF)
Mass Flow Meter, 200 sccm, 0.25 in. Tube, DB15, Metal Seal
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