How to Order Repair, Calibration, or Refurbishment Services
MKS Service

Equipment Return Authorization

To ensure that equipment received is properly serviced and tracked, it is required that you obtain an Return Materials Authorization (RMA) prior to returning the equipment to one of our Calibration and Service Centers.

Request an RMA on line now.

Download the Health & Safety Form. This form must be completed and included with equipment being sent to us for calibration and/or repair.

Download the Health & Safety Form here.

Purchase Orders

Purchase orders can be faxed or mailed directly to one of the Calibration and Service Centers. Whenever possible, a purchase order in an amount to cover repair cost should accompany the return. This will assist in expediting the turnaround.


It is our goal to accommodate your requirement for turnaround. If the instrument you are returning has caused a machine down situation, please inform us of this when you call to receive an RMA number.

Repair Warranty

Repairs are warranted to be free from defects in materials and workmanship for ninety days or the remainder of the original warranty, whichever is longer. This warranty does not apply to routine calibration of the instrument.

"Around the Clock" Technical Support

Technical support is available for installation, set-up, troubleshooting and production support on all MKS product lines. For technical assistance, please call 1-800-227-8766 and a service representative will assist you.