MKS Brand Service Programs
Trusted Service & Support

Comprehensive repair and service programs maximize the value of your installed base of critical subcomponents to ensure you...

  • Extend the life of your equipment
  • Drive more predictability
  • Increase uptime and tool availability
  • Improve productivity

Committed to your success, MKS provides highly skilled engineers and technicians who understand your process, your requirements, and keep your equipment up and running.

  • Only MKS original parts used for all repairs
  • Trained technicians use current, proven methods and techniques
  • All repairs qualified on an MKS-designed test stand

Our global network of 18 MKS Service Centers located throughout North America, Europe, and Asia-Pacific ensure that you have direct access to repair, refurbishment, and calibration services when and where you need them. MKS service programs address your operational efficiency while offering flexibility as your requirements change.

MKS Service Programs:

Field Service Support

World-class on-site assistance, including preventive maintenance, operations training, upgrade support, and installation and setup.

Extended Warranty Program

Maximize product value, reduce process uncertainty, and better manage maintenance costs.

Repair, Calibration & Refurbishment

Maintain and extend the life of your investment in MKS equipment.

Global Service Trade-in Program

A cost-effective path to the newest technology found in critical MKS subcomponents.

Service Inventory Solutions

MKS’ Service Inventory Solutions Program is designed to provide supply chain resiliency by identifying high use parts critical to your production process and stocking them to ensure fast delivery when a tool suddenly goes down and a replacement is needed.

Key MKS Service Links:

MKS Global Service Programs Brochure

Learn more about our comprehensive repair and service programs.

Repair, Calibration, and Refurbishment Services Data Sheet

Details about our repair, calibration, and refurbishment programs.

RMA Form

Complete this form when making a return.

Health & Safety Form

Complete and include this form when sending equipment to us for calibration and/or repair.

How to Order Services

Instructions and options for ordering MKS repair and calibration services.

Need help?

Contact MKS by sending us an email