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Vacuum Valve Actuators, Bellows & Nosepieces
Overview
- Replacement actuators for vacuum valves
- Service or maintain a vacuum valve
- Spare parts for limited downtime
Products
| Model | Drawings, CAD & Specs | Availability | Price | |||
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| 1084882 Valve Actuator, HFV High Flow and High Conductance Valve, NW100 |
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Valve Actuator, HFV High Flow and High Conductance Valve, NW200 or NW250 Port
$1,300
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100016358 Valve Actuator, HFV High Flow and High Conductance Valve, NW200 or NW250 Port | $1,300 |
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| 1084830-001 Valve Bellows, HFV High Flow/High Conductance Valve, NW100 |
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| 100016258 Valve Bellows, HFV High Flow/High Conductance Valve, NW160 | $1,400 |
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| 100016362 Valve Bellows, HFV High Flow/High Conductance Valve, NW200 or NW250 | $1,525 |
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| 20000641-001 Valve Nosepiece, HFV High Flow/High Conductance Valves, NW100 |
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| 100016261 Valve Nosepiece, HFV High Flow/High Conductance Valves, NW160 | $420 |
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| 100016278 Valve Nosepiece, HFV High Flow/High Conductance Valves, NW200 | $300 |
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| 100016365 Valve Nosepiece, HFV High Flow/High Conductance Valve, NW250 Port | $325 |
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Resources
Literature
- MKS Isolation Valve Spares & Kits (2.6 MB, PDF)
Ultra-High Velocity