HFV High Flow, High Conductance Vacuum Valves
Overview
MKS High Flow Valves (HFVs) increase system uptime due to their high cycle count lifetime of 1,000,000 cycles in clean environments and high conductance which allows for faster system pumping. An edge welded stainless steel bellows prevents outgassing and virtual leaks. The bellows stroke length is optimized to assure maximum conductance. The HFVs are designed to be easily and completely disassembled in the field, lowering the cost of replacing parts.
- Edge welded bellows provide maximum stroke length with high conductance
- Bellows-sealed poppet ensures a minimum of 1,000,000 cycles
- 304 stainless steel body, heatable to 160°C
- Can be mounted vertically or horizontally to accommodate footprint requirements
Products
Configuration Options
The following options are available for HFV High Flow Vacuum Isolation Valves
Ordering Code Example: V-250-AM-NVXXX
| Configuration Option | Option Code |
|---|---|
| HFV Vacuum Isolation Valve | V |
| Valve Size | |
| NW100 (4 in. valve) | 100 |
| NW160 (6 in. valve) | 160 |
| NW200 (8 in. valve) | 200 |
| NW250 (10 in. valve) | 250 |
| Body Configuration | |
| Angle Body | A |
| Flange Type | |
| ISO-MF | M |
| Limit Switch | |
| Limit Switch | L |
| No Limit Switch | N |
| Seal Type | |
| Viton® | V |
| Kalrez® | K |
| Chemraz® | Z |
| Heater | |
| No Heater* | XXX |
| Solenoid | |
| 12 VDC | 12D |
| 24 VDC | 24D |
| 24 VAC 50/60 Hz | 24A |
| 120 VAC 50/60 Hz | 120 |
| 240 VAC 50/60 Hz | 240 |
| 1/4 in. Tube Fittings | T25 |
| 1/4 in. Tube Fittings | T38 |
| 1/4 in. NPT Ports | None |
*Heated options are available. Please consult factory for ordering information.
Specifications
-
TypeHigh Conductance Vacuum Valve
-
Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
-
Body ConfigurationAngle, Inline
-
Port SizeNW100, NW160, NW200, NW250
-
Helium Leak Rate1.0 x 10-9 std cc/sec
-
Cylinder Air Pressure60-100 psig
-
Limit Switch Rating5A - 250 VAC
-
Single Pole, Single Throw5A - 30 VDC
-
Closing Time0.300 - 0.750, depending on configuration
-
Typical Life1,000,000 cycles
-
Weight12 - 55 pounds, depending on configuration
Features
Applications
HFV valves are ideally suited for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow (large pump line diameter) manufacturing applications.
Conductance Curve Chart
Heated Valves
HFVs are available with MKS heater solutions which ensure uniform internal temperature profiles to minimize condensation of process gases. An Ultem insulating barrier between the Festo™ actuator and valve body keeps heat inside the valve and away from the actuator. To accommodate process needs for high temperature or chemical resistance, a variety of elastomer seals are offered, including, Viton®, Chemraz®, and Kalrez®. Like all MKS isolation valves the HFV is offered with air solenoids for pneumatic actuation and limit switches for remote indication of the valve’s position.
Ultra-High Velocity