SmartPower® Intelligent Microwave Generators
Overview
SmartPower® AX2500 Series intelligent microwave power generators are built on proven experience in designing rugged, reliable microwave power generators for demanding semiconductor fabrication and industrial applications. The compact AX2500 design architecture incorporates field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.
- Available in 1.8 and 3 kW power levels for 200 and 300 mm applications
- Microprocessor-controlled filament cutback extends magnetron tube lifetime.
- Accurate power measurement and feedback ensures high repeatability
- Compact, modular design enhances cross-platform compatibility
- Field-replaceable magnetron tubes lower overall cost of ownership
Products
Specifications
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TypeIntelligent Microwave Generator
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Frequency2440 - 2470 MHz
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Ripple±1% of output power
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Output Accuracy±1.5% (from 20-100% of max. power)
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Ambient TemperatureUp to 40°C maximum
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Generator to Head DistanceUp to 100 feet maximum
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Microwave ConnectionsWR284F waveguide with CPR284F flanges
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Power Requirements200/208 VAC ±10%, 3 phase, 50/60 Hz
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ComplianceCE, ETL, Semi S2-93A, F47
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CoolingWater, 1.5 gpm, 30°C maximum @ 30 psid minimum, air
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Power Supply Generator Dimensions7.0 inches H x 19 inches W x 23 inches L (178 x 483 x 584mm)
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Power Head Magnetron Head Dimensions10 inches H x 7.62 inches W x 14.5 inches D (254 x 193.5 x 368.3mm)
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RegulationBetter than 1% of output power (line and load)
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Remote ControlAnalog, RS485, DeviceNet™
Features
Modular Architecture
All generators share a common, modular architecture and accurate power measurement, feedback and control for increased process control and reproducibility. All models have feedback-controlled power regulation of 0.1% of output power (line and load) and ripple of <±1% of output power. PrecisionPower™ technology improves accuracy of power control to <±1.5% of maximum power for increasing process consistency and yield. In addition, the PrecisionPower™ technology allows magnetrons to be replaced in the field, substantially reducing cost of ownership.
Microwave Plasma Subsystem
Intelligent Diagnostics
The AX2500 Series SmartPower® control technology monitors the generator’s operating system and provides power shutdown protection and intelligent diagnostics. The simple messages displayed on the SmartPower® generator front panel give the user all the information needed to understand system status, reduce MTTR and ensure maximum uptime.
SmartPower® generator microwave power accuracy during plasma operation. Forward power within ±1.5% of maximum power. Tests performed using AX7610 applicator. Reflected power minimized with SmartMatch to less than 1% in less than 2 sec.
Resources
Literature
- AX2500 Series SmartPower® Microwave Generators (218.7 kB, PDF)
Ultra-High Velocity