SmartMatch® Intelligent Microwave Matching Unit/Autotuner for 3 & 6kW Systems
Overview
SmartMatch® module is an advanced microwave matching unit which utilizes phase-magnitude detection hardware and an advanced predictive tuning algorithm to provide fast, reliable and repeatable matching. Available for power levels up to 6kW, with user selectable operating modes and reflected power threshold, the SmartMatch® module has been qualified to provide fast, reliable tuning with multiple plasma loads including O2, N2, CF4, NF3, H2O, NH3, N2H2 (and many others). Typical matching speed is below 1 second.
- Fast, reliable matching, even for difficult plasma loads
- Hands-off operation with no separate controller needed for increased accuracy and lower cost of ownership
- Advanced predictive algorithm complete with powerful micro-controller and fast stub moving mechanism
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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AX3060 Microwave Matching Unit, Auto tuner for 3 & 6 kW Systems |
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Specifications
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TypeSmartMatch® Microwave Matching Unit
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Time to Match<2 seconds
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Matching SystemThree stubs on 1-4 length waveguide intervals
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Waveguide SizeWR284
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Operating Frequency2.45 GHz ±15 MHz
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Possible Matching RangeMatch to maximum VSWR of 10
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Matching Head Weight14 lb. (6.4 kg)
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Mounting PositionAny
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User InterfaceRS485, Analog
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Ambient TemperatureUp to 50°C maximum
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Matching Head Cooling RequirementWater at 0.25 gpm, 30°C maximum @ 30 psid
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Matching Head Power Requirement24 VDC ±10%
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Measurement Module Size3.43 x 4.87 x 8.0 inches (87 x 124 x 203 mm) (H x W x L)
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Matching Head Size(H x W x L) 10.25 x 6.18 x 11 in. (260 x 156 x 279 mm)
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Measurement Module Weight2 lb. (0.9 kg)
Ultra-High Velocity