915 MHz Industrial Microwave Generators
Overview
- Proven reliable, modular and cost-effective power system
- Low weight and Compact industrial microwave generator system for flexible integration
- Shielded cabinet and safety interlocks for safe operation
- Low cost of maintenance
Products
Specifications
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TypeGS Series (GS150, GS300, GS500, GS750)
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Frequency915 MHz
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Input Power3x400 VAC, 50/60 Hz
3x480 VAC, 50/60 Hz -
Exit FlangeCPR 975
Features
Conductively Cooled Design
The patented conductively cooled design of the plasma tube supports high throughput and high power (up to 3kW) operation. The wide process window allows for AX7610 use in multiple applications, ranging from fast PR and polymer removal from 300mm wafers to fine-control low-k or atomic layer CVD processes.
Resources
Manuals
- GS 500 Microwave Generator Manual (3.3 MB, PDF)
Literature
- Alter® GS Series 915 MHz Industrial Microwave Generators (819.4 kB, PDF)
Other
- Making Waves in the Recycling World (1.4 MB, PDF)
Ultra-High Velocity