SEMOZON® AX8410 PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator
Overview
- Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C
- O2 flow rate from 5 slm to 80 slm enables process flexibility
- Patented cell structure design improves gap uniformity to enable production of high concentration ozone
- High ozone output enables innovative system design opportunities
- Closed-loop operation for tighter process control
- Multi-parameter touch screen interface for smart front panel operation and control
Products
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AX8410 Ozone Gas Generator, 5 - 80 slm, Ultra Clean, Ultra High Concentration |
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Specifications
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TypeOzone Gas Generator
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Ozone Outputup to 335 g/Nm3
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Flow Rate5 - 80 slm
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Feed GasOxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm Grade 5 or better N2
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Nominal Cell Pressure (Delivery)15 - 45 psig (100 - 310 kPa)
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Pressure20 - 50 psig
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Control InterfaceFront panel control and remote operation
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Cooling Water Temperature5 - 25°C (41 - 77°F)
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Cooling Water Filtration100 microns
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Cooling Water QualityResistivity ≥50 KΩ/cm
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Minimum Water Flow22.7 lpm (6.0 gpm)
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Voltage Requirements208 VAC (±10%)
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Phase3Ø & Ground, no Neutral
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Current Requirements50 Amps
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Frequency50/60 Hz
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Weight77 kg (170 lb)
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Dimensions483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
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ComplianceCE, UL/CSA, and SEMI F47
Resources
Application Notes
- SEMOZON® AX8410 PRIME High Flow, High Concentration Ozone Generator (239 kB, PDF)
- Ozone Data Conversion Tables (289.1 kB, PDF)
- Ozone Applications in Atomic Layer Processing (1.7 MB, PDF)
Technical Papers
- Ozone Applications for Atomic Layer Processing (1.5 MB, PDF)
Ultra-High Velocity